High voltage nanosecond pulser

• US 10,707,864 B2
• Filed: 04/04/2018
• Issued: 07/07/2020
• Est. Priority Date: 11/14/2013
• Status: Active Grant

• Current Assignee: EHT Ventures LLC
• Original Assignee: Eagle Harbor Technolologies, Inc.
• Inventors: Miller, Kenneth E, Ziemba, Timothy
• Primary Examiner(s): Retebo, Metasebia T
• Application Number:
  US15/945,722
• Publication Number:
  US 20190109591A1
• Time in Patent Office: 825 Days
• Field of Search: 327304
• CPC Class Codes: H03K 17/56 by the use, as active elements, of semiconductor devices using diodes H03K17/74
• CPC Class Codes: H03K 3/57 the switching device being a semiconductor device

Abstract

A nanosecond pulser may include a plurality of switch modules, a transformer, and an output. Each of the plurality of switch modules may include one or more solid state switches. The transformer may include a core, at least one primary winding wound around at least a portion of the core, each of the plurality of switch modules may be coupled with the primary windings, and a plurality of secondary windings wound at least partially around a portion of the core. The output may output electrical pulses having a peak voltage greater than about 1 kilovolt and having a pulse width of less than about 1000 nanoseconds. The output may output electrical pulses having a peak voltage greater than about 5 kilovolts, a peak power greater than about 100 kilowatts, a pulse width between 10 nanoseconds and 1000 nanoseconds, a rise time less than about 50 nanoseconds, or some combination thereof.

Claims

1. A nanosecond pulser comprising:

a DC power supply input;

a signal input that receives a driving signal having a input pulse width;

a first plurality of switch modules, each of the first plurality of switch modules include one or more solid state switches, and each of the first plurality of switch modules are coupled with the DC power supply input and the signal input such that the driving signal causes the first plurality of switch modules to switch DC power from the DC power supply;

a first toroid-shaped core;

a first primary winding that includes a first plurality of single windings that are each wound at least partially around a portion of the first toroid-shaped core, each of the first plurality of switch modules are electrically coupled with one of the first plurality of single windings;

a first secondary winding wound at least partially around a portion of the first toroid-shaped core;

a second plurality of switch modules, each of the second plurality of switch modules include one or more solid state switches, and each of the second plurality of switch modules are coupled with the DC power supply input and the signal input such that the driving signal causes the second plurality of switch modules to switch DC power from the DC power supply;

a second toroid-shaped core;

a second primary winding that includes a second plurality of single windings that are each wound at least partially around a portion of the second toroid-shaped core, each of the second plurality of switch modules are electrically coupled with one of the second plurality of single windings;

a second secondary winding wound at least partially around a portion of the second toroid-shaped core; and

an output coupled with the first secondary windings and coupled with the second secondary winding, the output providing an output pulse having a peak voltage greater than about 5 kilovolt and a pulse width that depends on the input pulse width.

2. The nanosecond pulser according to claim 1, wherein each of the first plurality of secondary windings are wound around a portion of the second core, and wherein each of the second plurality of secondary windings are wound around a portion of the first core.

3. The nanosecond pulser according to claim 1, wherein the output pulse has a peak power greater than about 100 kilowatts.

4. The nanosecond pulser according to claim 1, wherein the output pulse has a rise time less than about 50 nanoseconds.

5. The nanosecond pulser according to claim 1, wherein each of the one or more solid state switches comprises a switch selected from the group consisting of an IGBT, an FET, an SiC junction transistor, and a MOSFET.

6. The nanosecond pulser according to claim 1, further comprising a first fast capacitor electrically coupled with the first primary winding and at least one of the first plurality of switch modules, and a second fast capacitor electrically coupled with the second primary winding and at least one of the second plurality of switch modules.

7. The nanosecond pulser according to claim 6, wherein less than 50% of the energy in the first fast capacitor and/or the second fast capacitor is drained during each electrical pulse.

8. The nanosecond pulser according to claim 6, wherein either or both the first fast capacitor or the second fast capacitor has a stray inductance of less than 100 nH.

9. The nanosecond pulser according to claim 1, wherein the first plurality of secondary windings and the second plurality of secondary windings have a stray inductance of less than 100 nH.

10. The nanosecond pulser according to claim 1, wherein each of the first plurality of switch modules and/or each of the second plurality of switch modules has a stray inductance of less than 100 nH.

11. The nanosecond pulser according to claim 1, wherein stray inductance within the first plurality of switch modules and the first primary winding is less than 100 nH, and wherein stray inductance within the second plurality of switch modules and the second primary winding is less than 100 nH.

12. The nanosecond pulser according to claim 1, wherein stray capacitance within the nanosecond pulser is less than about 100 pF.

13. A nanosecond pulser comprising:

a circuit board;

a transformer comprising;

a toroid-shaped transformer core disposed on the circuit board;

a plurality of single primary windings wrapped around a substantial but not full portion of the transformer core; and

a single continuous secondary winding wound around the core;

a plurality of solid state switches, each of the plurality of solid state switches are electrically coupled with on of the plurality of single primary windings; and

an output coupled with the single continuous secondary winding producing pulses greater than 5 kV and having a pulse width that depends on the open and close time of the plurality of solid state switches.

14. The nanosecond pulser according to claim 13, wherein a duration of opening and closing of the plurality of solid state switches is directly proportional to a pulse width of an output pulse, and wherein an output pulse width from an output coupled with the plurality of secondary windings is directly proportional to the pulse width of the input pulse.

15. The nanosecond pulser according to claim 13, further comprising a plurality of capacitors disposed on the circuit board, wherein each of the plurality of capacitors are disposed on the circuit board between the core and at least one of the plurality of solid state switches.

16. The nanosecond pulser according to claim 13, further comprising a plurality of diodes disposed on the circuit board, wherein each of the plurality of diodes are disposed on the circuit board between the core and at least one of the plurality of solid state switches.

17. The nanosecond pulser according to claim 13, wherein stray capacitance within the nanosecond pulser is less than about 100 pF.

18. A nanosecond pulser comprising:

a first solid state switch;

a second solid state switch;

a high voltage power source coupled with the first solid state switch and the second solid state switch;

an input electronically coupled with the first solid state switch and the second solid state switch, wherein the input provides an input pulse signal to the first solid state switch and the second solid state switch causing the first solid state switch and the second solid state switch to switch the high voltage power source with an input pulse width, and an input pulse repetition frequency;

a transformer having a primary side and a secondary side, the primary side is electronically coupled with the first solid state switch and the second solid state switch; and

an output electrically coupled with the second side of the transformer, the output configured to produce an output voltage having a pulse peak voltage greater than about 5 kilovolts, a pulse width that depends on the input pulse, and an output pulse repetition frequency that depends on the input pulse repetition frequency.

19. The nanosecond pulser according to claim 18, wherein the transformer comprises a core, a plurality of primary windings, and a plurality of secondary windings, wherein the plurality of solid state switches are electrically coupled with the plurality of primary windings and the output is electrically coupled with the plurality of secondary windings.