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Semiconductor defect classification device, method for classifying defect of semiconductor, and semiconductor defect classification system

  • US 10,713,778 B2
  • Filed: 07/11/2018
  • Issued: 07/14/2020
  • Est. Priority Date: 12/19/2017
  • Status: Active Grant
First Claim
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1. A semiconductor defect classification device comprising:

  • feature extractors configured to receive images of semiconductor patterns on a wafer, the images comprising a low resolution image, a high resolution image, a reference image, and an optical image of the semiconductor patterns, and to extract features of the images from the images;

    a comparator configured to compare a feature of the low resolution image and a feature of the reference image and to generate a result of the comparison; and

    a classifier configured to receive the features of the images, first meta information about the wafer, and the result of the comparison and to use machine learning to classify a defect of the semiconductor patterns associated with the images based on the features of the images, which include the feature of the low resolution image, a feature of the high resolution image, and a feature of the optical image, the result of the comparison, and the first meta information.

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