Semiconductor reaction chamber showerhead

• US 10,714,315 B2
• Filed: 10/12/2012
• Issued: 07/14/2020
• Est. Priority Date: 10/12/2012
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM IP Holdings B.V.
• Inventors: White, Carl, Dunn, Todd, Shero, Eric, Fondurulia, Kyle
• Primary Examiner(s): Bennett, Charlee J. C.
• Application Number:
  US13/651,144
• Publication Number:
  US 20140103145A1
• Time in Patent Office: 2,832 Days
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45574 Nozzles for more than one gas
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow

Abstract

A showerhead including a body having an opening, a first plate positioned within the opening and having a plurality of slots, a second plate positioned within the opening and having a plurality of slots, and wherein each of the first plate plurality of slots are concentrically aligned with the second plate plurality of slots.

Claims

1. A showerhead comprising:

a base plate comprising a least a portion of an exhaust channel and having an opening and a plurality of base plate slots;

a middle plate positioned within the opening and having a plurality of middle plate slots and protrusions, the protrusions each comprising a protrusion slot; and

,

an upper plate comprising a top surface having a plurality of cooling fins formed therein, a first gas hole and a second gas hole,

wherein the first gas hole conveys a first gas into a first gas cavity and the second gas hole conveys a second gas into a second gas cavity,

wherein each of the plurality of base plate slots is concentrically aligned with the plurality of middle plate slots,

wherein the first gas cavity is defined between the upper plate and the middle plate and the second gas cavity is defined between the middle plate and the base plate,

wherein the first gas cavity and the second gas cavity are fluidly coupled to the exhaust channel,

wherein a first gas purge channel extends from the first gas cavity, wherein the first gas purge channel feeds into a first plenum, wherein the first plenum is coupled to a first valve,

wherein a second gas purge channel extends from the second gas cavity, wherein the second gas purge channel feeds into a second plenum, wherein the second plenum is coupled to a second valve,

wherein one of the first and second valves is configured to provide a purge gas into the first or second gas cavity,

wherein the other of the first and second valves is configured to provide a negative pressure to the first or second gas cavity,

wherein the first gas purge channel extends from the first gas cavity through an opening that is separate from the first gas hole,

wherein the second gas purge channel extends from the second gas cavity through an opening that is separate from the second gas hole,

wherein the first and second gas purge channels do not convey the first gas or the second gas into the first and second gas cavities,

wherein the first gas cavity is in fluid communication with the first gas hole and the second gas cavity is in fluid communication with the second gas hole,

wherein the protrusions extend into the base plate slots,

wherein a gap is formed between each protrusion and each base plate slot and the gap is in fluid communication with the second gas cavity,

wherein the protrusion slots are in fluid communication with the first gas cavity,

wherein the protrusion slots comprise a first radius extending through a portion of the protrusion and a second radius that is smaller than the first radius extending through another portion of the protrusion,

wherein the protrusions extend to at least a bottom surface of the base plate slots, and

wherein the gap terminates at the bottom surface.

2. The showerhead of claim 1 wherein the protrusions extend beyond a bottom surface of the base plate slots.

3. The showerhead of claim 1 wherein the plurality of base plate slots and the plurality of middle-plate slots are oriented in a plurality of rings, wherein adjacent base plate slots are offset with respect to one another.

4. The showerhead of claim 1 wherein the plurality of base plate slots and the plurality of middle plate slots are oriented in a plurality of rings, wherein base plate slots of every other ring are in alignment.

5. The showerhead of claim 1 wherein the gap is between 0.575 mm and 0.800 mm.

6. The showerhead of claim 1 wherein a second gap is formed within each of the plurality of middle plate slots, and wherein the second gap is between 0.636 mm and 1.100 mm.

7. The showerhead of claim 1 wherein a first gas flows from the first gas cavity formed between the middle plate and the upper plate and a second gas flows from the second gas cavity formed between the base plate and the middle plate.

8. The showerhead of claim 1 wherein the first valve is configured to provide the negative pressure to the first gas cavity, wherein the first plenum is connected to an exhaust feed line, wherein the exhaust feed line is connected to the exhaust channel, and wherein when the first valve provides the negative pressure, an unused precursor gas in the first gas cavity is moved into the exhaust channel.

9. The showerhead of claim 1 wherein the first gas purge channel is positioned at a perimeter of the first gas cavity.

10. The showerhead of claim 1 wherein the first valve is configured to provide the purge gas into the first gas cavity.

11. The showerhead of claim 1 wherein the first gas purge channel is operatively connected to a vacuum.

12. The showerhead of claim 11 wherein the first gas purge channel removes the first gas during a purging operation.

13. The showerhead of claim 1 wherein the second gas valve is configured to provide the negative pressure to the second gas cavity, wherein the second plenum is connected to an exhaust feed line, wherein the exhaust feed line is connected to the exhaust channel, and wherein when the second valve provides the negative pressure, an unused precursor gas in the second gas cavity is moved into the exhaust channel.

14. The showerhead of claim 1, wherein a plurality of apertures extend from a top surface to a bottom surface of the middle plate and are separate from the plurality of middle plate slots.

15. The showerhead of claim 14, wherein the plurality of apertures are in fluid communication with the second gas cavity.

16. The showerhead of claim 1 wherein the plurality of middle plate slots are generally arcuate in shape.

17. The showerhead of claim 16 wherein each of the plurality of middle plate slots extend less than 50 percent of a circular distance of the showerhead body.

18. The showerhead of claim 1 wherein a gas in the base plate slots does not contact a gas in the middle plate slots until both of the gasses have traveled completely through the base plate slots and the middle plate slots.

19. The showerhead of claim 1, wherein each of the protrusion slots further comprises an angled sidewall extending from the second radius.