Miniaturized Fourier-transform Raman spectrometer systems and methods

• US 10,718,668 B2
• Filed: 08/08/2018
• Issued: 07/21/2020
• Est. Priority Date: 08/08/2017
• Status: Active Grant

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Gu, Tian, Kita, Derek Matthew, Hu, Juejun
• Primary Examiner(s): Decenzo, Shawn
• Application Number:
  US16/058,927
• Publication Number:
  US 20190049300A1
• Time in Patent Office: 713 Days
• Field of Search: None
• CPC Class Codes: G01J 3/0218 using optical fibers
• CPC Class Codes: G01J 3/0259 Monolithic
• CPC Class Codes: G01J 3/0272 Handheld
• CPC Class Codes: G01J 3/44 Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
• CPC Class Codes: G01J 3/453 by correlation of the amplitudes
• CPC Class Codes: G01J 3/4532 Devices of compact or symmetric construction G01J3/4531 takes precedence
• CPC Class Codes: G01N 21/65 Raman scattering

Abstract

State-of-the-art portable Raman spectrometers use discrete free-space optical components that must be aligned well and that don'"'"'t tolerate vibrations well. Conversely, the inventive spectrometers are made with monolithic photonic integration to fabricate some or all optical components on one or more planar substrates. Photonic integration enables dense integration of components, eliminates manual alignment and individual component assembly, and yields superior mechanical stability and resistance to shock or vibration. These features make inventive spectrometers especially suitable for use in high-performance portable or wearable sensors. They also yield significant performance advantages, including a large (e.g., 10,000-fold) increase in Raman scattering efficiency resulting from on-chip interaction of the tightly localized optical mode and the analyte and a large enhancement in spectral resolution and sensitivity resulting from the integration of an on-chip Fourier-transform spectrometer.

Claims

1. A system, comprising:

a light source to emit a probe beam;

a probe waveguide, in optical communication with the light source, to receive the probe beam and cause at least a portion of the probe beam to interact with a sample, the interaction between the probe beam and the sample generating a Raman signal;

a filter, in optical communication with the sample, to transmit the Raman signal and block the probe beam;

a Fourier transform spectrometer in optical communication with the filter, the Fourier transform spectrometer comprising;

a beam splitter to split the Raman signal into a first portion and a second portion;

a first interference arm, in optical communication with the beam splitter, to receive the first portion of the Raman Signal, the first interference arm comprising;

a first optical switch switchable between a first state and a second state;

a first reference waveguide having a first optical path length L₁ to receive the first portion of the Raman signal when the first optical switch is in the first state; and

a first variable waveguide having a second optical path length L₂, different than the first optical path length L₁, to receive the first portion of the Raman signal when the first optical switch is in the second state; and

a second interference arm, in optical communication with the beam splitter, to receive the second portion of the Raman Signal; and

at least one detector, in optical communication with the first interference arm and the second interference arm, to detect interference of the first portion of the Raman signal from the first interference arm and the second portion of the Raman signal from the second interference arm.

2. The system of claim 1, wherein the probe waveguide comprises a spiral-shaped waveguide section.

3. The system of claim 1, further comprising:

a lens, in optical communication with the probe waveguide, to focus the probe beam toward the sample.

4. The system of claim 3, wherein the lens is configured to collect the Raman signal from the sample, and further comprising:

at least one other waveguide, in optical communication with the lens, the couple the Raman signal from the lens to the filter.

5. The system of claim 4, wherein the at least one other waveguide comprises:

an array of waveguides in optical communication with the sample, each waveguide in the array of waveguides being configured to receive a corresponding portion of the Raman signal from the sample.

6. The system of claim 1, wherein the probe waveguide comprises a first curved facet to focus the probe beam toward the sample.

7. The sample of claim 6, further comprising:

another waveguide, in optical communication with the sample and the filter, the other waveguide having a second curved facet to collect the Raman signal from the sample.

8. The system of claim 1, wherein the filter comprises a Bragg reflector.

9. The system of claim 1, further comprising:

a beam combiner in optical communication with the first interference arm and the second interference arm, the beam combiner comprising;

a first input, in optical communication with the first interference arm, to receive the first portion of the probe beam;

a second input, in optical communication with the second interference arm, to receive the second portion of the probe beam;

a first output; and

a second output,

wherein the at least one detector comprises;

a first detector in optical communication with the first output; and

a second detector in optical communication with the second output.

10. The system of claim 1, further comprising:

a substrate, wherein the at least one probe waveguide, the filter, the Fourier transform spectrometer, and the at least one detector are fabricated on or in the substrate.

11. A method of Raman spectroscopy, the method comprising:

emitting a probe beam from a laser;

guiding the probe beam from the laser to a sample via a first waveguide integrated in or on a substrate;

coupling the probe beam out of the first waveguide to a sample, the probe beam causing the sample to generate a Raman signal;

coupling the Raman signal into a second waveguide integrated in or on the substrate;

splitting the Raman signal into a first portion and a second portion;

guiding the first portion through a first interference arm integrated in or on the substrate, the first interference arm comprising;

an optical switch switchable between a first state and a second state;

a reference waveguide having a first optical path length L1 to receive the first portion when the first optical switch is in the first state; and

a variable waveguide having a second optical path length L2, different than the first optical path length L1, to receive the first portion when the first optical switch is in the second state; and

guiding the second portion through a second interference arm integrated in or on the substrate; and

interfering the first portion and the second portion at a detector coupled to the first interference arm and the second interference arm.

12. The method of claim 11, further comprising:

switching the optical switch between the first state and the second state.

13. The method of claim 11, wherein coupling the probe beam out of the first waveguide to the sample comprises focusing the probe beam toward the sample with a lens integrated in or on the substrate.

14. The method of claim 13, wherein coupling the Raman signal into the second waveguide comprises collecting the Raman signal from the sample with the lens.

15. The method of claim 11, wherein coupling the Raman signal into the second waveguide further comprises coupling respective portions of the Raman signal into respective waveguides in an array of waveguides integrated in or on the substrate.

16. The method of claim 11, wherein coupling the probe beam out of the first waveguide to the sample comprises focusing the probe beam with a curved facet at an end of the first waveguide.

17. The method of claim 11, wherein coupling the Raman signal into the second waveguide comprises reflecting the Raman signal off a second curved facet into the second waveguide.

18. A Raman spectroscopy system comprising:

a substrate;

a laser, integrated on the substrate, to emit a probe beam;

a first waveguide, integrated on or in the substrate in optical communication with the laser, to guide the probe beam;

a lens, integrated on or in the substrate in optical communication with the first waveguide, to direct the probe beam to a sample and to collect a Raman signal from the sample in response to the probe beam;

at least one second waveguide, integrated on or in the substrate in optical communication with the lens, to guide the Raman signal;

a spectrometer, integrated on or in the substrate in optical communication with the at least one second waveguide, to separate the Raman signal into spectral bins; and

at least one photodetector, integrated on or in the substrate in optical communication with the spectrometer, to detect an output of the spectrometer,

wherein the spectrometer comprises;

an optical switch switchable between a first state and a second state;

a reference waveguide having a first optical path length L1 to receive a first portion of the Raman signal when the first optical switch is in the first state; and

a variable waveguide having a second optical path length L2, different than the first optical path length L1, to receive the first portion when the first optical switch is in the second state.

19. The Raman spectroscopy system of claim 18, wherein the at least one second waveguide comprises an array of second waveguides, each of which is configured to guide a corresponding portion of the Raman signal.