X-ray source for 2D scanning beam imaging

• US 10,720,300 B2
• Filed: 09/29/2017
• Issued: 07/21/2020
• Est. Priority Date: 09/30/2016
• Status: Active Grant

• Current Assignee: American Science and Engineering Incorporated (OSI Systems Incorporated)
• Original Assignee: American Science and Engineering Incorporated (OSI Systems Incorporated)
• Inventors: Rommel, Martin, Schubert, Jeffrey R.
• Primary Examiner(s): Green, Yara B
• Application Number:
  US15/719,689
• Publication Number:
  US 20180286624A1
• Time in Patent Office: 1,026 Days
• Field of Search: 378137
• CPC Class Codes: G21K 1/043 changing time structure of beams by mechanical means, e.g. choppers, spinning filter wheels
• CPC Class Codes: H01J 35/147 Spot size control
• CPC Class Codes: H01J 35/153 Spot position control
• CPC Class Codes: H01J 35/30 by deflection of the cathode ray

Abstract

A two-dimensional X-ray scanner that includes a beam steerer for steering an electron beam to impinge upon a target; and a collimator further including an aperture adapted for travel in an aperture travel path for rotating the X-ray beam plane spanned by the electron beam impinging upon the target along a focal track for emitting a scanning X-ray beam.

Claims

1. A two-dimensional X-ray scanning system comprising:

an X-ray scanner comprising;

a beam focuser;

a beam steerer for scanning an electron beam on a path along an X-ray production target as a function of time; and

an aperture adapted for travel in an aperture travel path relative to the X-ray production target, wherein the X-ray scanner remains stationary with respect to the object of inspection; and

a detector configured to detect X-rays passing through an object or scattered by the object of inspection and generate two-dimensional data indicative of the detected X-rays.

2. A The two-dimensional X-ray scanning system of claim 1, wherein the aperture is an intersection of a fixed slit and a moving slit.

3. The two-dimensional X-ray scanning system of claim 1, wherein the X-ray production target is a planar target block.

4. The two-dimensional X-ray scanning system of claim 1, wherein the X-ray production target is convex.

5. The two-dimensional X-ray scanning system of claim 4, wherein the X ray scanner is configured to have a predefined take-off angle and wherein, during operation, the electron beam is steered across the convex X-ray production target to maintain the pre-defined take-off angle with the travelling aperture.

6. A method for sweeping an X-ray beam across an object of inspection in two dimensions using a two-dimensional X-ray scanner wherein the X-ray scanner is configured to remain stationary with respect to the object of inspection, the method comprising:

varying a direction of a beam of electrons relative to a target upon which the beam of electrons impinges; and

coupling X-rays generated at the target via an aperture that moves along a prescribed path as a function of time.

7. The method in accordance with claim 6, wherein coupling X-rays generated at the target may include coupling the X-rays via an intersection of a fixed slit and a moving slit.

8. The method in accordance with claim 6, wherein the target is a planar target block.

9. The method in accordance with claim 6, wherein the target is convex.

10. The method in accordance with claim 9, wherein the two-dimensional X ray scanner is configured to have a predefined take-off angle and wherein, during operation, the electron beam is steered across the convex X-ray production target to maintain the pre-defined take-off angle with the travelling aperture.

11. A two-dimensional X-ray scanner comprising:

a beam steerer for steering an electron beam to impinge upon a target and thereby emit an X-ray beam; and

a collimator comprising an aperture adapted for travel in an aperture travel path in order to rotate the electron beam impinging upon the target while maintaining an angular alignment with the target, wherein the two-dimensional X-ray scanner is configured to remain stationary relative to an object under inspection.

12. The two-dimensional X-ray scanner in accordance with claim 11, wherein the target is a planar target block.

13. The two-dimensional X-ray scanner in accordance with claim 11, wherein the target is convex.

14. The two-dimensional X-ray scanner in accordance with claim 13, wherein the two-dimensional X ray scanner is configured to have a predefined take-off angle and wherein, during operation, the electron beam is steered across the convex X-ray production target to maintain the pre-defined take-off angle with the travelling aperture.