Adaptive periodic waveform controller

• US 10,727,027 B2
• Filed: 02/12/2019
• Issued: 07/28/2020
• Est. Priority Date: 12/04/2014
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Fisk, II, Larry J., Radomski, Aaron T., Smyka, Jonathan W.
• Primary Examiner(s): Taningco, Alexander H
• Assistant Examiner(s): Sathiraju, Srinivas
• Application Number:
  US16/273,595
• Publication Number:
  US 20190214231A1
• Time in Patent Office: 532 Days
• Field of Search: None
• CPC Class Codes: H01J 2237/332 Coating
• CPC Class Codes: H01J 2237/334 Etching
• CPC Class Codes: H01J 37/32146 Amplitude modulation, includes pulsing
• CPC Class Codes: H01J 37/32155 Frequency modulation
• CPC Class Codes: H01J 37/32174 Circuits specially adapted for controlling the RF discharge
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/3299 Feedback systems

Abstract

A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.

Claims

1. A power output generation system, comprising:

a setpoint generator module that selectively varies a setpoint for an output parameter during successive time intervals;

a closed-loop module that, during a first time interval, generates a closed-loop signal based on the setpoint and a measurement of the output parameter during the first time interval, respectively;

an adjusting module that, during the first time interval, generates an adjustment signal based on the setpoint during a prior time interval and the output parameter during the prior time interval, respectively; and

a power amplifier that applies an output to a load in accordance with the closed-loop signal and the adjustment signal.

2. The power output generation system of claim 1 wherein the first time interval and prior time interval are equally spaced.

3. The power output generation system of claim 1 wherein the first time interval and prior time interval are not equally spaced.

4. The power output generation system of claim 1 wherein the closed-loop module generates the closed-loop signal using proportional-integral (PI) control.

5. The power output generation system of claim 1 wherein the adjusting module generates the adjustment signal using proportional-integral (PI) control.

6. The power output generation system of claim 1 further comprising a mixer module that generates an output signal based on the closed-loop signal and the adjusting signal, respectively, and that controls power input to the power amplifier based on the output signal, the mixer module generates the output signal further based on a mixing ratio, and

wherein the mixer module selectively varies the mixing ratio.

7. The power output generation system of claim 1 further comprising a frequency control module that selectively adjusts a fundamental frequency of the power amplifier.

8. The power output generation system of claim 7 wherein the frequency control module selectively adjusts the frequency of the power amplifier based on a reflected power.

9. The power output generation system of claim 7 wherein the frequency control module selectively adjusts the frequency of the power amplifier based on a reflection coefficient.

10. The power output generation system of claim 1 wherein the power amplifier applies the output to a plasma electrode.

11. The power output generation system of claim 1 further comprising a driver control module that determines a distortion of the output and selectively adjusts a frequency of the power amplifier based on the distortion.

12. The power output generation system of claim 11 wherein the driver control module determines a first frequency adjustment based on the distortion and at least one previous amount of distortion of the output, determines a second frequency adjustment based on at least one previous amount of distortion of an RF output, and that sets the frequency of the power amplifier based on a previous frequency of the power amplifier, the first frequency adjustment, and the second frequency adjustment.

13. The power output generation system of claim 12 wherein the driver control module determines the second frequency adjustment based on at least one previous value of the second frequency adjustment.

14. A power output generation control system for controlling a power amplifier that applies output power to a load, comprising:

a repeating setpoint generator module that selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals;

an adjusting module that, during a first time interval, generates an adjustment signal based on the setpoint during a prior time interval and of the output parameter during the prior time interval, respectively; and

a mixer module that generates an output signal based on a closed-loop signal and the adjustment signal, respectively, and that controls power input to the power amplifier based on the output signal.

15. The power output generation control system of claim 14 further comprising a closed-loop module that, during the first time interval, generates the closed-loop signal based on the setpoint and a measurement of the output parameter during the first time interval, respectively.

16. The power output generation control system of claim 15 further comprising a power amplifier that applies the output power to the load.

17. The power output generation control system of claim 14 further comprising a power amplifier that applies the output power to the load.

18. The power output generation control system of claim 14 wherein the first time interval and prior time interval are equally spaced.

19. The power output generation control system of claim 14 wherein the first time interval and prior time interval are not equally spaced.

20. The power output generation control system of claim 14 wherein the adjusting module generates the adjustment signal using at least one of proportional, integral, or derivative control.

21. The power output generation control system of claim 14 wherein the mixer module generates the output signal further based on a mixing ratio, and wherein the mixer module selectively varies the mixing ratio.

22. The power output generation control system of claim 14 further comprising a frequency control module that selectively adjusts a fundamental frequency of the power amplifier.

23. The power output generation control system of claim 22 wherein the frequency control module selectively adjusts the frequency of the power amplifier based on one of a reflected power or a reflection coefficient.