Impedance matching device

• US 10,734,196 B2
• Filed: 09/25/2017
• Issued: 08/04/2020
• Est. Priority Date: 09/29/2016
• Status: Active Grant

• Current Assignee: Daihen Corporation
• Original Assignee: Daihen Corporation
• Inventors: Morii, Tatsuya, Nakahama, Masayuki
• Primary Examiner(s): Jones, Stephen E.
• Assistant Examiner(s): Outten, Samuel S
• Application Number:
  US16/333,381
• Publication Number:
  US 20190214232A1
• Time in Patent Office: 1,044 Days
• CPC Class Codes: H01G 5/16 using variation of distance between electrodes
• CPC Class Codes: H01J 37/32091 the radio frequency energy being capacitively coupled to the plasma
• CPC Class Codes: H01J 37/32183 Matching circuits
• CPC Class Codes: H03H 7/38 Impedance-matching networks
• CPC Class Codes: H03H 7/40 Automatic matching of load impedance to source impedance
• CPC Class Codes: H03H 7/54 Modifications of networks to reduce influence of variations of temperature
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 2242/26 Matching networks

Abstract

Provided is an impedance matching device for matching an impedance between a high-frequency power source and a load. The impedance matching device pertaining to the present invention is provided with: a matching circuit having variable capacitors, a capacitance of which is adjusted by an ON/OFF operation of a plurality of switches; a switch control unit for performing control for causing states of the switches of the variable capacitors to coincide with a target state in order to adjust the capacitance of the variable capacitors; and a switch state evaluation unit for evaluating whether a switch is in a state requiring suppression of a temperature increase. The switch control unit is configured so that when the switch state evaluation unit evaluates that a switch of the variable capacitors is in a state requiring suppression of a temperature increase, control is performed for suspending changing of a switch state of the switch for a set period and suppressing a temperature increase in the switch.

Claims

1. An impedance matching device for matching an output impedance of a high-frequency power source and a load-side impedance, which is an impedance of a circuit viewed from an output terminal of the high-frequency power source to a load-side circuit, said impedance matching device comprising:

a matching circuit disposed between said high-frequency power source and a load, the matching circuit being provided with at least one variable capacitor having a structure in which a plurality of capacitance elements are connected in parallel, the capacitance elements being constituted from a capacitor and a capacitance adjustment switch connected in series, and the capacitance adjustment switch comprising a semiconductor element;

a matching calculation unit for performing, at a set period, a matching calculation for determining, as a target switch state, a state in which the capacitance adjustment switches provided to said matching circuit should take in order for the output impedance of said high-frequency power source and said load-side impedance to be matched;

a switch control unit for performing control for causing switch states of the capacitance adjustment switches provided to said matching circuit to coincide with said target switch state; and

a switch state evaluation unit for evaluating whether at least one of the capacitance adjustment switches provided to said matching circuit is in a state requiring suppression of a temperature increase;

said switch control unit being configured so that when an evaluation is made by said switch state evaluation unit that at least one of the capacitance adjustment switches provided to said matching circuit is in a state requiring suppression of a temperature increase, the at least one capacitance adjustment switch provided to said matching circuit is designated as a protection-object switch, and temperature increase suppression control for suppressing a temperature increase in said protection-object switch by stopping switching operation of said protection-object switch or reducing a frequency with which said protection-object switch performs switching operation is performed for a set temperature increase suppression period.

2. The impedance matching device of claim 1, wherein:

said switch state evaluation unit is provided with change frequency evaluation means for evaluating whether a switch state change frequency of a monitoring-object switch is equal to or greater than a set evaluation reference value, said monitoring-object switch being at least one of the capacitance adjustment switches provided to said matching circuit, and the switch state change frequency being a number of times that a switch state of the monitoring-object switch is changed from an ON state to an OFF state or from the OFF state to the ON state in a set evaluation reference time, and the switch state evaluation unit is configured so as to evaluate that at least one of the capacitance adjustment switches provided to said matching circuit is in a state requiring suppression of a temperature increase when an evaluation is made by said change frequency evaluation means that the switch state change frequency of at least one monitoring-object switch is equal to or greater than said evaluation reference value.

3. The impedance matching device of claim 2, wherein:

a temperature sensor for detecting a temperature that reflects a temperature of the capacitance adjustment switches provided to said matching circuit, and evaluation reference value setting means for setting the evaluation reference value used by said switch state evaluation means in accordance with the temperature detected by said temperature sensor are further provided; and

said evaluation reference value setting means is configured so as to make said evaluation reference value smaller the higher the temperature detected by said temperature sensor is.

4. The impedance matching device of claim 3, wherein:

temperature increase suppression period setting means for setting said temperature increase suppression period in accordance with the temperature detected by said temperature sensor is further provided; and

said temperature increase suppression period setting means is configured so as to make said temperature increase suppression period longer the higher the temperature detected by said temperature sensor is.

5. The impedance matching device of claim 2, wherein:

said switch state evaluation unit is configured so as to designate at least one variable capacitor provided to said matching circuit as a monitoring-object variable capacitor, and to designate at least one capacitance adjustment switch provided to the monitoring-object variable capacitor as said monitoring-object switch.

6. The impedance matching device of claim 2, wherein:

the switch state change frequency of said monitoring-object switch is a number of times that the switch state of the monitoring-object switch is changed in a set evaluation reference time.

7. The impedance matching device of claim 2, wherein:

the switch state change frequency of said monitoring-object switch is a number of times that said matching calculation unit changes the target switch state of said monitoring-object switch in said evaluation reference time.

8. The impedance matching device of claim 2, wherein:

a temperature sensor for detecting a temperature that reflects a temperature of the capacitance adjustment switches provided to said matching circuit, and evaluation reference time setting means for setting the evaluation reference time used by said switch state evaluation means in accordance with the temperature detected by said temperature sensor are further provided; and

said evaluation reference time setting means is configured so as to make said evaluation reference time shorter the higher the temperature detected by said temperature sensor is.

9. The impedance matching device of claim 2, wherein:

a temperature sensor for detecting a temperature that reflects a temperature of the capacitance adjustment switches provided to said matching circuit, and temperature increase suppression period setting means for setting said temperature increase suppression period in accordance with the temperature detected by said temperature sensor are further provided; and

said temperature increase suppression period setting means is configured so as to make said temperature increase suppression period longer the higher the temperature detected by said temperature sensor is.

10. The impedance matching device of claim 2, wherein:

said switch control unit is configured so that, from among said monitoring-object switches, a monitoring-object switch that is evaluated by said change frequency evaluation means as having a switch state change frequency equal to or greater than the set evaluation reference value is designated as said protection-object switch.

11. The impedance matching device of claim 2, wherein:

said change frequency evaluation means is configured so that in a process of evaluating whether the switch state change frequency of said monitoring-object switch is equal to or greater than the set evaluation reference value, when the switch state change frequency reaches the evaluation reference value before said evaluation reference time has elapsed, the change frequency evaluation means evaluates that the switch state change frequency of said monitoring-object switch is equal to or greater than the set evaluation reference value without waiting for said evaluation reference time to elapse.

12. The impedance matching device of claim 1, wherein:

said matching calculation unit is configured so as to sample, at a set sampling period, a parameter that reflects an impedance viewed from the output terminal of said high-frequency power source toward the load, and to perform said matching calculation each time said parameter is sampled.

13. The impedance matching device of claim 12, wherein:

said switch state evaluation unit is provided with load-side impedance occurrence frequency detection means for detecting, as a load-side impedance variation occurrence frequency, a number of times that a variation greater than or equal to a set size occurs in said load-side impedance in a set evaluation reference time, and load-side impedance variation occurrence frequency evaluation means for evaluating whether the detected load-side impedance variation occurrence frequency is equal to or greater than a set evaluation reference value, and said switch state evaluation unit is configured so as to evaluate that at least one of the capacitance adjustment switches provided to said matching circuit is in a state requiring suppression of a temperature increase when an evaluation is made by said load-side impedance variation occurrence frequency evaluation means that the load-side impedance variation occurrence frequency is equal to or greater than the set evaluation reference value.

14. The impedance matching device of claim 13, wherein:

said load-side impedance variation occurrence frequency detection means is configured so that each time said matching calculation unit samples the parameter that reflects the impedance viewed from the output terminal of said high-frequency power source toward the load, a difference between a parameter at an immediately preceding sampling thereof and a parameter at a current sampling thereof is detected as a parameter variation amount, a number of times that a parameter variation amount equal to or greater than a set size is detected in said evaluation reference time being designated as said load-side impedance variation occurrence frequency.

15. The impedance matching device of claim 12, wherein:

said switch control unit is configured so as to reduce a frequency of switching operation by said protection-object switch by causing said matching calculation unit to sample said parameter at a period longer than said set sampling period when said temperature increase suppression control is performed.

16. The impedance matching device of claim 1, wherein:

said protection-object switch is at least one capacitance adjustment switch, from among the capacitance adjustment switches provided to said matching circuit, including a switch having a high probability of reaching a state in which suppression of a temperature increase is required when a state of varying load-side impedance is continued.

17. The impedance matching device of claim 1, wherein:

first through n^th capacitors and first through n^th capacitance adjustment switches connected in series to the first through n^th capacitors, respectively, are provided to the variable capacitors provided to said matching circuit;

said matching calculation unit is configured so that first through n^th digits of an n-bit binary number, the first digit and n^th digit thereof being, respectively, a least significant digit and a most significant digit thereof, are made to correspond respectively to said first through n^th capacitors, and the target switch state to be attained by said first through n^th capacitance adjustment switches is indicated by whether each of the first through n^th digits of the n-bit binary number are 1 or 0; and

said switch state evaluation unit is configured so as to evaluate that at least one of the capacitance adjustment switches provided to said matching circuit is in a state requiring suppression of a temperature increase when a number of times that the n-bit binary number changes in the set evaluation reference time is equal to or greater than a set evaluation reference value.

18. The impedance matching device of claim 1, wherein:

a temperature sensor for detecting a temperature that reflects a temperature of the capacitance adjustment switches provided to said matching circuit is provided; and

said switch state evaluation unit is configured so as to evaluate that at least one of the capacitance adjustment switches provided to said matching circuit is in a state requiring suppression of a temperature increase when the temperature detected by said temperature sensor is equal to or greater than a set evaluation reference value.

19. The impedance matching device of claim 1, wherein:

said switch control unit is configured so that all of the capacitance adjustment switches provided to said matching circuit are designated as said protection-object switches.

20. The impedance matching device of claim 1, characterized in that said matching calculation unit is configured so as to stop said matching calculation for said temperature increase suppression period and resume said matching calculation after said temperature increase suppression period has elapsed.

21. The impedance matching device of claim 1, characterized in that said matching calculation unit is configured so as to perform said matching calculation also during said temperature increase suppression period.