Method for depositing a metal chalcogenide on a substrate by cyclical deposition
First Claim
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1. A method for depositing a metal chalcogenide on a substrate by cyclical deposition, the method comprising:
- contacting the substrate with at least one metal containing vapor phase reactant comprising, a partial chemical structure represented by the formula M—
O—
C, wherein “
M”
represents a metal atom, wherein “
O”
represents an oxygen atom, and wherein “
C”
represents a carbon atom, and wherein the metal atom is bonded to the oxygen atom, and wherein the oxygen atom is bonded to the carbon atom; and
contacting the substrate with at least one chalcogen containing vapor phase reactant.
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Abstract
A method for depositing a metal chalcogenide on a substrate by cyclical deposition is disclosed. The method may include, contacting the substrate with at least one metal containing vapor phase reactant and contacting the substrate with at least one chalcogen containing vapor phase reactant. Semiconductor device structures including a metal chalcogenide deposited by the methods of the disclosure are also provided.
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Citations
24 Claims
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1. A method for depositing a metal chalcogenide on a substrate by cyclical deposition, the method comprising:
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contacting the substrate with at least one metal containing vapor phase reactant comprising, a partial chemical structure represented by the formula M—
O—
C, wherein “
M”
represents a metal atom, wherein “
O”
represents an oxygen atom, and wherein “
C”
represents a carbon atom, and wherein the metal atom is bonded to the oxygen atom, and wherein the oxygen atom is bonded to the carbon atom; andcontacting the substrate with at least one chalcogen containing vapor phase reactant. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification