Methods, structures, and designs for self-aligning local interconnects used in integrated circuits
First Claim
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1. An integrated circuit, comprising:
- a local interconnect conductive structure including a first portion and a second portion, the first portion of the local interconnect conductive structure having a substantially rectangular shape with a length measured in a first direction and a width measured in a second direction, the second portion of the local interconnect conductive structure having a substantially rectangular shape with a length measured in the second direction and a width measured in the first direction, the second portion of the local interconnect conductive structure connected to the first portion of the local interconnect conductive structure at a location in the second direction between neighboring gate electrode level conductive structures, wherein the first portion of the local interconnect structure is self-aligned between the neighboring gate electrode level conductive structures.
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Abstract
An integrated circuit includes a gate electrode level region that includes a plurality of linear-shaped conductive structures. Each of the plurality of linear-shaped conductive structures is defined to extend lengthwise in a first direction. Some of the plurality of linear-shaped conductive structures form one or more gate electrodes of corresponding transistor devices. A local interconnect conductive structure is formed between two of the plurality of linear-shaped conductive structures so as to extend in the first direction along the two of the plurality of linear-shaped conductive structures.
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Citations
25 Claims
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1. An integrated circuit, comprising:
a local interconnect conductive structure including a first portion and a second portion, the first portion of the local interconnect conductive structure having a substantially rectangular shape with a length measured in a first direction and a width measured in a second direction, the second portion of the local interconnect conductive structure having a substantially rectangular shape with a length measured in the second direction and a width measured in the first direction, the second portion of the local interconnect conductive structure connected to the first portion of the local interconnect conductive structure at a location in the second direction between neighboring gate electrode level conductive structures, wherein the first portion of the local interconnect structure is self-aligned between the neighboring gate electrode level conductive structures. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
Specification