GAS DRIVEN ROTATING SUSCEPTOR FOR RAPID THERMAL PROCESSING (RTP) SYSTEM
First Claim
Patent Images
1. An apparatus, comprising:
- a rotatable base for supporting an object being processed in a Rapid Thermal Processing (RTP) system; and
a first means for preventing warping of the base due to non uniform heating of the base by radiation from the object being processed.
1 Assignment
0 Petitions
Accused Products
Abstract
An apparatus for preventing warping of a rotatable base for supporting an object being processed in a Rapid Thermal Processing (RTP) system due to non uniform heating of the base by radiation from the object being processed is disclosed.
25 Citations
23 Claims
-
1. An apparatus, comprising:
-
a rotatable base for supporting an object being processed in a Rapid Thermal Processing (RTP) system; and
a first means for preventing warping of the base due to non uniform heating of the base by radiation from the object being processed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
-
16. A method of rapid thermal processing (RTP) of an object, comprising:
-
supporting the object on a rotatable base;
processing the object with radiation from radiation sources of an RTP system while rotating the object on the rotatable base; and
preventing the base from warping due to non-uniform heating of the base by radiation from the object being processed. - View Dependent Claims (17, 18, 19, 20, 21, 22)
-
-
23. A system for rapid thermal processing (RTP) of an object, comprising:
-
a radiation source for producing radiation to heat the object;
a chamber for containing the object to be processed, the chamber having at least a part of at least one wall transparent to the radiation from the radiation source;
a gas handling system for controlling the gas in the chamber;
a means for monitoring the temperature of the object;
a computer system for controlling the gas handling system and the radiation sources;
a rotatable base for supporting an object being processed within the chamber; and
a first means for preventing warping of the rotatable base due to non uniform heating of the base by radiation from the object being processed.
-
Specification