Film forming apparatus

• US 20010003966A1
• Filed: 12/14/2000
• Published: 06/21/2001
• Est. Priority Date: 12/16/1999
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Kitano, Takahiro, Koga, Norihisa, Akimoto, Masami, Takeshita, Kazuhiro, Ishizaka, Nobukazu, Morikawa, Masateru, Esaki, Yukihiko, Ookuma, Hirofumi
• Application Number:
  US09/735,902
• Publication Number:
  US 20010003966A1
• Time in Patent Office: Days
• US Class Current: 118/70
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence

Abstract

A discharge nozzle in a film forming apparatus of the present invention includes a substantially cylindrical support member and a thin plate or a thin plate portion supported on a face on a substrate side of the support member and closing the face on the substrate side, and a discharge port for discharging a coating solution is provided in the thin plate or the thin plate portion. It is possible to form a smaller discharge port in the thin plate or the thin plate portion by laser processing, punching, or the like than that obtainable by conventional injection molding processing. An amount of discharge and a discharge area on the substrate of the coating solution can be controlled more precisely. The film forming apparatus of the present invention includes a cleaning device for cleaning the discharge nozzle which includes a cleaning solution jet port for jetting a cleaning solution for cleaning to the discharge port of the discharge nozzle and a suction port for sucking an atmosphere in the vicinity of the discharge port. Contaminants adhering to the discharge port are removed more completely than before. Accordingly, the cleaning can be conducted effectively even if the diameter of the discharge port is very small. The suction port can suck and drain properly the cleaning solution jetted to the discharge port, preventing scatter of the cleaning solution and contamination around the discharge port.

Claims

1. A film forming apparatus for supplying a coating solution from a discharge nozzle to a substrate to form a film on a front face of said substrate,

wherein said discharge nozzle comprises a substantially cylindrical support member and a thin plate, supported on a face on a substrate side of said support member, for closing the face on the substrate side, and

wherein said thin plate is provided with a discharge port for discharging said coating solution to said substrate.

2. An apparatus as set forth in

claim 1

, further comprising:

a holding member for fixing said thin plate to said support member from the outside.

3. An apparatus as set forth in

claim 2

,

wherein an edge portion of a face on the substrate side of said discharge port is formed such that said discharge port increases in diameter as it comes closer to said substrate.

4. An apparatus as set forth in

claim 2

,

wherein an edge portion of a face on the opposite side to a face on the substrate side of said discharge port is formed such that said discharge port decreases in diameter as it comes closer to said substrate.

5. An apparatus as set forth in

claim 2

,

wherein a recessed portion is formed in a peripheral portion of an edge portion of the face on the substrate side of said discharge port.

6. An apparatus as set forth in

claim 2

,

wherein at least said discharge port has been subjected to water repellent treatment to said coating solution.

7. An apparatus as set forth in

claim 2

,

wherein said thin plate is attachable and detachable to/from said support member.

8. An apparatus as set forth in

claim 2

,

wherein a plurality of said discharge ports are provided in said thin plate.

9. An apparatus as set forth in

claim 2

,

wherein said discharge nozzle is movable in a horizontal direction with respect to said substrate.

10. An apparatus as set forth in

claim 2

, further comprising:

a temperature regulator capable of adjusting temperature of said thin plate.

11. An apparatus as set forth in

claim 2

,

wherein said support member is provided with a flow path through which a fluid for adjusting temperature flows.

12. An apparatus as set forth in

claim 2

,

wherein said holding member is provided with a flow path through which a fluid for adjusting temperature flows.

13. An apparatus as set forth in

claim 10

,

wherein said temperature regulator is an electro-thermal element, and said electro-thermal element is provided in contact with said support member or said holding member.

14. An apparatus as set forth in

claim 2

,

wherein said coating solution is a coating solution for forming a photoresist, an amount of a photoresist film formation component in said coating solution being 1.0% to 7.0% of said coating solution.

15. An apparatus as set forth in

claim 2

,

wherein said coating solution is a coating solution for forming a layer insulating film, an amount of a layer insulating film formation component in said coating solution being 1.0% to 8.0% of said coating solution.

16. An apparatus as set forth in

claim 2

,

wherein said holding member has side faces in box shape.

17. A film forming apparatus for supplying a coating solution from a discharge nozzle to a substrate to form a film on a front face of said substrate,

wherein said discharge nozzle comprises a substantially cylindrical support member and a thin plate portion, disposed on a face on a substrate side of said support member, for closing the face on the substrate side,

wherein said thin plate portion is integrated with a holding member which is attachable and detachable to/from said support member, and

wherein said thin plate portion is provided with a discharge port for discharging said coating solution to said substrate.

18. An apparatus as set forth in

claim 17

,

wherein an edge portion of a face on the opposite side to a face on the substrate side of said discharge port is formed such that said discharge port decreases in diameter as it comes closer to said substrate.

19. An apparatus as set forth in

claim 17

,

wherein a recessed portion is formed in a peripheral portion of an edge portion of the face on the substrate side of said discharge port.

20. An apparatus as set forth in

claim 17

,

wherein at least said discharge port has been subjected to water repellent treatment to said coating solution.

21. An apparatus as set forth in

claim 17

,

wherein a plurality of said discharge ports are provided in said thin plate portion.

22. An apparatus as set forth in

claim 17

,

wherein said discharge nozzle is movable in a horizontal direction with respect to said substrate.

23. An apparatus as set forth in

claim 17

, further comprising:

a temperature regulator capable of adjusting temperature of said thin plate portion.

24. An apparatus as set forth in

claim 17

,

wherein said support member is provided with a flow path through which a fluid for adjusting temperature flows.

25. An apparatus as set forth in

claim 17

,

wherein said holding member is provided with a flow path through which a fluid for adjusting temperature flows.

26. An apparatus as set forth in

claim 23

,

wherein said temperature regulator is an electro-thermal element, and said electro-thermal element is provided in contact with said support member or said holding member.

27. An apparatus as set forth in

claim 17

,

wherein said coating solution is a coating solution for forming a photoresist, an amount of a photoresist film formation component in said coating solution being 1.0% to 7.0% of said coating solution.

28. An apparatus as set forth in

claim 17

,

wherein said coating solution is a coating solution for forming a layer insulating film, an amount of a layer insulating film formation component in said coating solution being 1.0% to 8.0% of said coating solution.

29. A film forming apparatus for supplying a coating solution from a discharge nozzle to a substrate to form a film on a front face of said substrate, comprising:

a cleaning device for cleaning said discharge nozzle,

said cleaning device comprising a cleaning solution jet port for jetting a cleaning solution for cleaning to a discharge port of said discharge nozzle and a suction port for sucking an atmosphere in the vicinity of said discharge port.

46. An apparatus as set forth in

claim 29

,

wherein ultrasound is applied to said cleaning solution to be jetted.

47. An apparatus as set forth in

claim 29

,

wherein air bubbles are mixed into said cleaning solution to be jetted.

48. An apparatus as set forth in

claim 29

,

wherein said cleaning solution to be jetted is intermittently jetted.

49. An apparatus as set forth in

claim 29

,

wherein a plurality of jet ports for jetting said cleaning solution are provided.

50. An apparatus as set forth in

claim 29

, further comprising:

a diaphragm-type pump for supplying said coating solution to said discharge nozzle;

a detecting function unit for detecting a change in forcing amount of said pump; and

a cleaning controller for causing said cleaning device to start cleaning based on a detection result by said detecting function unit.

51. An apparatus as set forth in

claim 29

,

wherein said cleaning block is provided with a cover for covering at least a lower periphery of said discharge nozzle.

30. A film forming apparatus for supplying a coating solution from a discharge nozzle to a substrate to form a film on a front face of said substrate, comprising:

a cleaning device for cleaning said discharge nozzle,

said discharge nozzle comprising a substantially cylindrical support member, a thin plate provided on a lower face of said support member for closing the lower face, and a discharge port formed in said thin plate,

said cleaning device comprising a cleaning block including a flat close contact portion closely contacting said thin plate at an upper end,

wherein said cleaning block is provided with a cleaning solution jet port for jetting a cleaning solution toward said discharge port of said discharge nozzle and a suction port for sucking an atmosphere in the vicinity of said discharge port when said cleaning block closely contacts said thin plate.

37. An apparatus as set forth in

claim 30

,

wherein a cleaning recessed portion is formed at the center in a top portion of said cleaning block, and

wherein said jet port and said suction port are open in said cleaning recessed portion.

38. An apparatus as set forth in

claim 37

,

wherein a jet path leading to said jet port and a suction path leading to said suction port are formed inside said cleaning block.

39. An apparatus as set forth in

claim 37

,

wherein said cleaning block comprises a gas supply mechanism for supplying an inert gas for drying toward said discharge port of said discharge nozzle, and

wherein a supply port of said inert gas is open in said cleaning recessed portion.

40. An apparatus as set forth in

claim 39

,

wherein a jet path leading to said jet port, a suction path leading to said suction port, and a supply path leading to said supply port are formed inside said cleaning block.

41. An apparatus as set forth in

claim 39

,

wherein said inert gas is set at a predetermined temperature.

44. An apparatus as set forth in

claim 30

,

wherein said discharge nozzle is movable relative to said substrate, and

wherein said cleaning block is disposed within a range of motion of said discharge nozzle and vertically movable.

45. An apparatus as set forth in

claim 30

,

wherein said discharge nozzle is movable relative to said substrate, and

wherein said cleaning block is held by a carrier mechanism movable within a range of motion of said discharge nozzle, and said carrier mechanism is vertically movable.

31. A film forming apparatus for supplying a coating solution from a discharge nozzle to a substrate to form a film on a front face of said substrate, comprising:

a cleaning device for cleaning said discharge nozzle,

said discharge nozzle comprising a substantially cylindrical support member, a thin plate provided on a lower face of said support member for closing the lower face, a discharge port formed in said thin plate, and a holding member for fixing said thin plate to said support member from the outside,

said cleaning device comprising a cleaning block including a flat close contact portion closely contacting said holding member at an upper end,

wherein said cleaning block is provided with a cleaning solution jet port for jetting a cleaning solution toward said discharge port of said discharge nozzle and a suction port for sucking an atmosphere in the vicinity of said discharge port when said cleaning block closely contacts said holding member.

34. An apparatus as set forth in

claim 31

,

wherein said thin plate is integral with said holding member in structure.

35. An apparatus as set forth in

claim 34

,

wherein a sealing member is interposed between said holding member and said close contact portion.

42. An apparatus as set forth in

claim 34

,

wherein said jet port is formed at a position opposing said discharge port of said discharge nozzle.

43. An apparatus as set forth in

claim 34

,

wherein said suction port is formed at a position opposing said discharge port of said discharge nozzle.

32. A film forming apparatus for supplying a coating solution from a discharge nozzle to a substrate to form a film on a front face of said substrate, comprising:

a cleaning device for cleaning said discharge nozzle in contact with said discharge nozzle,

said discharge nozzle comprising a substantially cylindrical support member, a thin plate supported on a lower face of said support member for closing the lower face, and a discharge port with a predetermined diameter formed in said thin plate,

said cleaning device comprising a cleaning block including protrusions on a face contacting said thin plate,

wherein said cleaning block is provided with a cleaning solution jet port for jetting a cleaning solution toward said discharge port of said discharge nozzle and a suction port for sucking an atmosphere in the vicinity of said discharge port when said cleaning block contacts said thin plate via said protrusions.

33. A film forming apparatus for supplying a coating solution from a discharge nozzle to a substrate to form a film on a front face of said substrate, comprising:

a cleaning device for cleaning said discharge nozzle in contact with said discharge port,

said discharge nozzle comprising a substantially cylindrical support member, a thin plate supported on a lower face of said support member for closing the lower face, a discharge port formed in said thin plate, and a holding member for fixing said thin plate to said support member from the outside,

said cleaning device comprising a cleaning block including protrusions on a face contacting said holding member,

wherein said cleaning block is provided with a cleaning solution jet port for jetting a cleaning solution toward said discharge port of said discharge nozzle and a suction port for sucking an atmosphere in the vicinity of said discharge port when said cleaning block contacts said holding member via said protrusions.

36. An apparatus as set forth in

claim 33

,

wherein said thin plate is integral with said holding member in structure.