Method for hermetically encapsulating microsystems in situ
First Claim
1. A method for hermetically encapsulating microsystems in situ wherein, in a first phase, several microsystems are mounted on a common substrate, said microsystems being surrounded by a metal adhesion layer deposited on the substrate, the method wherein, in a second phase, in a common deposition step a first metal layer is deposited on each microsystem and on an annular zone of the adhesion layer surrounding each microsystem, so as to completely cover each microsystem by overlap, wherein a second metal layer is deposited by electrolytic means on the first metal layer and on the adhesion layer so as to cover the first layer over most of its surface leaving at least one passage per microsystem in the second layer to provide access to the first layer, the metal of the first layer being different from the metals of the adhesion layer, the second layer and the microsystem, wherein the first layer is removed by selective chemical etching through each passage of the second layer, and wherein said passages are then closed to obtain metal capsules hermetically enclosing each microsystem.
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Accused Products
Abstract
The method for hermetically encapsulating microsystems in situ consists, in a first phase, of mounting on a common substrate (1), several microsystems (6) surrounded by a metal adhesion layer (4) deposited on the substrate (1). In a second phase, in a common deposition step a first metal layer (7) is deposited by electrolytic means on each microsystem (6) and on an annular zone (7a) of the adhesion layer (4) surrounding each microsystem (6), so as to completely cover each microsystem by overlap. Subsequently a second metal layer (9) is deposited by electrolytic means on the first metal layer (7) and on the adhesion layer so as to cover most of the first layer with the exception of at least one passage (10) per microsystem (6), providing access to the first layer (7). The metal of the first layer is different from the metals of the adhesion layer, the second layer and the microsystem. The first layer (7) is removed by selective chemical etching through the passages (10) which are closed to obtain metal capsules hermetically enclosing each microsystem.
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Citations
18 Claims
- 1. A method for hermetically encapsulating microsystems in situ wherein, in a first phase, several microsystems are mounted on a common substrate, said microsystems being surrounded by a metal adhesion layer deposited on the substrate, the method wherein, in a second phase, in a common deposition step a first metal layer is deposited on each microsystem and on an annular zone of the adhesion layer surrounding each microsystem, so as to completely cover each microsystem by overlap, wherein a second metal layer is deposited by electrolytic means on the first metal layer and on the adhesion layer so as to cover the first layer over most of its surface leaving at least one passage per microsystem in the second layer to provide access to the first layer, the metal of the first layer being different from the metals of the adhesion layer, the second layer and the microsystem, wherein the first layer is removed by selective chemical etching through each passage of the second layer, and wherein said passages are then closed to obtain metal capsules hermetically enclosing each microsystem.
Specification