Field emission display and method for fabricating the same
First Claim
1. A field emission display comprising a cathode array, the cathode array including:
- a cathode electrode formed on a substrate;
insulating layers and carbon nanotube films for use as emitter electrodes formed alternately on the cathode electrode; and
, a gate electrode formed on the insulating layer.
1 Assignment
0 Petitions
Accused Products
Abstract
Field emission display and method for fabricating the same, the field emission display including a cathode array having a cathode electrode formed on a substrate, insulating layers and carbon nanotube films for use as emitter electrodes formed alternately on the cathode electrode, and a gate electrode formed on the insulating layer, thereby permitting fabrication of a large sized cathode plate at a low cost because the film is formed by screen printing and exposure, which can reduce the cumbersome steps in fabrication of the related art Spindt emitter tip, and both a low voltage and a high voltage FEDs because the carbon nanotube film used as the emitter has a low work function, with an easy and stable electron emission capability.
-
Citations
15 Claims
-
1. A field emission display comprising a cathode array, the cathode array including:
-
a cathode electrode formed on a substrate;
insulating layers and carbon nanotube films for use as emitter electrodes formed alternately on the cathode electrode; and
,a gate electrode formed on the insulating layer. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A method for fabricating a field emission display, comprising the steps of:
-
(1) forming a cathode electrode, an insulating layer, and a gate electrode on a substrate in succession;
(2) etching the gate electrode and the insulating layer into a cathode array pattern, to form an emitter region;
(3) forming a sacrificial layer on the gate electrode which is not etched;
(4) depositing a carbon nanotube film on the cathode electrode in the emitter region, to form an emitter; and
,5) etching the sacrificial layer for removing the carbon nanotube formed on the sacrificial layer, to form a cathode array. - View Dependent Claims (9, 10, 11, 12, 13)
-
-
14. A method for fabricating a field emission display, comprising the steps of:
-
(1) forming a cathode electrode, an insulating layer, a gate electrode, and a sacrificial layer on a substrate in succession;
(2) etching the sacrificial layer, the gate electrode, and the insulating layer into a cathode array pattern, to form an emitter region;
(3) forming a carbon nanotube film as an emitter on the cathode electrode in an etched emitter region; and
,(4) etching the sacrificial layer not etched in the step (2) for removing the carbon nanotube formed on the sacrificial layer, to form a cathode array. - View Dependent Claims (15)
-
Specification