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Method for patterning thin films

  • US 20010006766A1
  • Filed: 01/12/2001
  • Published: 07/05/2001
  • Est. Priority Date: 01/14/1999
  • Status: Active Grant
First Claim
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1. A method of making an imaged surface comprising:

  • A. providing a substrate having a coating and an interface comprising the region where the coating and the substrate are closest to each other;

    B. exposing at least one part of the total area of the coating to a flux of electromagnetic energy sufficient to disrupt the interface but insufficient to ablate the coating, and C. removing tie parts of the coating in registry with the portions of the interface area that was disrupted.

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