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Method of coating substrate and coated article

  • US 20010007715A1
  • Filed: 01/04/2001
  • Published: 07/12/2001
  • Est. Priority Date: 01/07/2000
  • Status: Abandoned Application
First Claim
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1. A method of coating a substrate which comprises setting the substrate on the periphery of a cylindrical substrate holder rotatable on its axis, setting two or more sputtering cathodes having the respective targets attached thereto with the surfaces of said targets being parallel to the periphery of said cylindrical substrate holder and said sputtering cathodes being apart from each other, sputtering the targets while rotating said cylindrical substrate holder to have said substrate pass in front of said targets at least twice to form a coating comprising the materials of said targets on said substrate, wherein said targets have at least two different kinds of compositions, and said sputtering is carried out so as to make a substantially continuous change in composition of the coating in the thickness direction.

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