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Angular velocity sensor

  • US 20010008087A1
  • Filed: 01/02/2001
  • Published: 07/19/2001
  • Est. Priority Date: 01/14/2000
  • Status: Active Grant
First Claim
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1. An angular velocity sensor comprising:

  • a substrate;

    an oscillator disposed on the substrate so as to be displaceable relative to the substrate; and

    impact damping means disposed on the substrate for dampening the effect on oscillations of the oscillator from an impact to the substrate.

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