Angular velocity sensor
First Claim
1. An angular velocity sensor comprising:
- a substrate;
an oscillator disposed on the substrate so as to be displaceable relative to the substrate; and
impact damping means disposed on the substrate for dampening the effect on oscillations of the oscillator from an impact to the substrate.
1 Assignment
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Accused Products
Abstract
An angular velocity sensor includes a substrate; an impact damping mechanism disposed on the substrate for damping an impact applied to the substrate; an oscillator supported to the inside of the impact damping mechanism displaceable in two directions parallel to the substrate and orthogonal to each other by using an oscillator support beam; oscillation-generating means for oscillating the oscillator in an oscillating direction; and angular-velocity detecting means for detecting a displacement of the oscillator as an angular velocity when the oscillator is displaced in a detecting direction orthogonal to the oscillating direction. The impact damping mechanism damps an impact along at least one direction of the oscillating direction and the detecting direction so as to prevent the impact from being transferred to the oscillator from the substrate.
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Citations
11 Claims
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1. An angular velocity sensor comprising:
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a substrate;
an oscillator disposed on the substrate so as to be displaceable relative to the substrate; and
impact damping means disposed on the substrate for dampening the effect on oscillations of the oscillator from an impact to the substrate. - View Dependent Claims (6, 7, 8, 10, 11)
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2. An angular velocity sensor comprising:
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a substrate;
an impact damping mechanism disposed on the substrate for damping an impact applied to the substrate;
an oscillator supported on the substrate by at least one oscillator support beam, such as to be displaceable in two directions parallel to the substrate and orthogonal to each other;
oscillation-generating means for oscillating the oscillator in an oscillating direction parallel to one of the two directions; and
angular-velocity detecting means for detecting a displacement of the oscillator as an angular velocity when the oscillator is displaced in a detecting direction orthogonal to the oscillating direction, wherein the impact damping mechanism damps an impact to the substrate along at least one direction of the oscillating direction and the detecting direction so as to prevent the impact from being transferred to the oscillator from the substrate. - View Dependent Claims (3, 4, 5, 9)
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Specification