Active anti-vibration apparatus and exposure apparatus

• US 20010011697A1
• Filed: 02/07/2001
• Published: 08/09/2001
• Est. Priority Date: 02/09/2000
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Maeda, Takashi, Wakui, Shinji, Iwai, Isao
• Granted Patent: US 6,684,132 B2
• Time in Patent Office: Days
• US Class Current: 248/550
• CPC Class Codes: F16F 15/027 comprising control arrangements F16F15/0237 takes precedence
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

This invention relates to an active anti-vibration apparatus having an anti-vibration table on which a stage is mounted. This anti-vibration apparatus includes a pneumatic spring actuator for supporting and driving the anti-vibration table, a PI compensator for PI-compensating a target velocity signal determined by a velocity profile concerning the stage and necessary for driving the stage, and a motion mode distributing operation unit for controlling the pneumatic spring actuator in accordance with an output signal from the PI compensator.

Claims

1. An active anti-vibration apparatus comprising:

an anti-vibration table on which a stage is mounted;

an actuator which supports and drives said anti-vibration table utilizing a fluid;

a compensator which generates a signal by PI- or PID-compensating a target value signal concerning said stage and necessary for driving said stage, or a signal equivalent thereto; and

a controller which controls said actuator in accordance with an output signal from said compensator.

2. The apparatus according to

claim 1

, wherein said compensator includes a PI compensator which PI-compensate s a target velocity signal concerning said stage and necessary for driving said stage.

3. The apparatus according to

claim 1

, wherein said compensator includes

a first P compensator which P-compensates a target velocity signal concerning said stage and necessary for driving said stage,

a second P compensator which P-compensates a target position signal concerning said stage and necessary for driving said stage, and

an adder which adds output signals from said first and second compensators.

4. The apparatus according to

claim 1

, wherein said compensator includes a PID compensator which PID-compensates a target velocity signal concerning said stage and necessary for driving said stage.

5. The apparatus according to

claim 1

, wherein said compensator includes

a first P compensator which P-compensates a target velocity signal concerning said stage and necessary for driving said stage,

a second P compensator which P-compensates a target position signal concerning said stage and necessary for driving said stage,

a third P compensator which P-compensates a target acceleration signal concerning said stage and necessary for driving said stage, and

an adder which adds output signals from said first, second, and third compensators.

6. The apparatus according to

claim 1

, wherein said actuator includes a pneumatic spring actuator.

7. The apparatus according to

claim 1

, wherein said controller controls said actuator in accordance with the output signal from said compensator such that inclination of said anti-vibration table which occurs when said stage is driven is corrected.

8. A method of correcting inclination of an anti-vibration table on which a stage is mounted, comprising:

the compensating step of generating a signal by PI- or PID-compensating a target value signal concerning said stage and necessary for driving said stage, or a signal equivalent thereto; and

the controlling step of controlling said actuator which supports and drives said anti-vibration table utilizing a fluid in accordance with the generated signal.

9. The method according to

claim 8

, wherein the compensating step includes the step of PI-compensating a target velocity signal concerning said stage and necessary for driving said stage.

10. The method according to

claim 8

, wherein the compensating step includes

the first P compensating step of P-compensating a target velocity signal concerning said stage and necessary for driving said stage,

the second P compensating step of P-compensating a target position signal concerning said stage and necessary for driving said stage, and

the adding step of adding the signals compensated in the first and second compensating steps.

11. The method according to

claim 8

, wherein the compensating step includes the step of PID-compensating a target velocity signal concerning said stage and necessary for driving said stage.

12. The method according to

claim 8

, wherein the compensating step includes

the first P compensating step of P-compensating a target velocity signal concerning said stage and necessary for driving said stage,

the second P compensating step of P-compensating a target position signal concerning said stage and necessary for driving said stage,

the third P compensating step of P-compensating a target acceleration signal concerning said stage and necessary for driving said stage, and

the adding step of adding the signals compensated in the first, second, and third compensating steps.

13. The method according to

claim 8

, wherein said actuator includes a pneumatic spring actuator.

14. The method according to

claim 8

, wherein the controlling step includes controlling said actuator in accordance with the signal compensated in the compensating step such that inclination of said anti-vibration table which occurs when said stage is driven is corrected.

15. An exposure apparatus having an original stage on which an original is to be placed, and a substrate stage on which a substrate where a pattern of the original is to be transferred is placed, at least one of said original stage and said substrate stage comprising:

an anti-vibration table on which said stage is mounted;

an actuator which supports and drives said anti-vibration table utilizing a fluid;

a compensator which generates a signal by PI- or PID-compensating a target value signal concerning said stage and necessary for driving said stage, or a signal equivalent thereto; and

a controller which controls said actuator in accordance with an output signal from said compensator.

16. A device manufacturing method including:

the coating step of coating a substrate with a photosensitive material;

the exposure step of transferring by an exposure apparatus a pattern of an original to the substrate coated with said photosensitive material; and

the developing step of developing the substrate to which the pattern has been transferred,

said exposure apparatus having an original stage on which the original is to be placed, and a substrate stage on which the substrate coated with the photosensitive material is to be placed, at least one of said original stage and said substrate stage comprising;

an anti-vibration table on which said stage is mounted,

an actuator which supports and drives said anti-vibration table utilizing a fluid,

a compensator which generates a signal by PI- or PID-compensating a target value signal concerning said stage and necessary for driving said stage, or a signal equivalent thereto, and

a controller which controls said actuator in accordance with an output signal from said compensator.