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Capacitance type sensor

  • US 20010011994A1
  • Filed: 02/07/2001
  • Published: 08/09/2001
  • Est. Priority Date: 02/08/2000
  • Status: Active Grant
First Claim
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1. A capacitance type sensor comprising;

  • a substrate;

    a group of fixed electrodes provided on an upper face of said substrate;

    a movable electrode plate having an electrode on a lower face thereof; and

    a gap provided between said group of fixed electrodes on said substrate and said electrode on said movable electrode plate, said gap being formed with a solder layer provided on said substrate.

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