Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing
First Claim
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1. A method of forming an LiCoO2 film, comprising:
- depositing a film of LiCoO2 on a substrate;
rapidly heating the film of LiCoO2 to a target temperature; and
maintaining the film of LiCoO2 at the target temperature for a target annealing time of at most approximately 60 minutes.
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Abstract
Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques.
5 Citations
24 Claims
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1. A method of forming an LiCoO2 film, comprising:
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depositing a film of LiCoO2 on a substrate;
rapidly heating the film of LiCoO2 to a target temperature; and
maintaining the film of LiCoO2 at the target temperature for a target annealing time of at most approximately 60 minutes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 22)
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15. A cathode made by a process of:
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depositing a film of LiCoO2 on a substrate;
rapidly heating the film of LiCoO2 to a target temperature; and
maintaining the film of LiCoO2 at the target temperature for a target annealing time of at most approximately 60 minutes. - View Dependent Claims (16, 17, 18, 19, 20, 21, 23)
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24. A composition, comprising:
a film of LiCoO2 on a substrate wherein a majority of grains are oriented with their (101) and (104) planes parallel to the substrate.
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