Process monitoring system for lithography lasers
First Claim
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1. A system for monitoring lithography lasers at at least one integrated circuit fabrication plant, said system, comprising:
- A) a plurality of lasers each being configured for use as illumination sources in an integrated circuit lithography process, B) a terminal server associated with each one of said plurality of lasers;
C) a central fabrication plant server unit in communication through a local area network with each of said plurality of lasers;
said central fabrication plant unit being programmed to acquire data from each of said lasers and to store at least portions of the data in raw form and/or summary form;
D) a second server unit providing communication through a communication network between said first server unit and computers utilized by persons having access authorization to the information stored by said first server unit;
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Abstract
A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each of the lasers through a local area network. Information from the lasers is collected by the central control server unit and the information is used to provide summary information which is made available in a web site format to interested parties having access authorization.
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Citations
14 Claims
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1. A system for monitoring lithography lasers at at least one integrated circuit fabrication plant, said system, comprising:
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A) a plurality of lasers each being configured for use as illumination sources in an integrated circuit lithography process, B) a terminal server associated with each one of said plurality of lasers;
C) a central fabrication plant server unit in communication through a local area network with each of said plurality of lasers;
said central fabrication plant unit being programmed to acquire data from each of said lasers and to store at least portions of the data in raw form and/or summary form;
D) a second server unit providing communication through a communication network between said first server unit and computers utilized by persons having access authorization to the information stored by said first server unit;
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification