Silicon thin-film, integrated solar cell,module, and methods of manufacturing the same

• US 20010020485A1
• Filed: 02/02/2001
• Published: 09/13/2001
• Est. Priority Date: 07/02/1998
• Status: Active Grant

• Current Assignee: Heritage Power, LLC
• Original Assignee: AstroPower, Inc. (GE Aerospace)
• Inventors: Barnett, Allen M., Ford, David H., Rand, James A., Hall, Robert B.
• Granted Patent: US 6,420,643 B2
• Time in Patent Office: Days
• US Class Current: 136/244
• CPC Class Codes: H01L 31/03682 including only elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 31/03921 including only elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 31/046 PV modules composed of a plurality of thin film solar cells deposited on the same substrate
• CPC Class Codes: H01L 31/0465 comprising particular structures for the electrical interconnection of adjacent PV cells in the module H01L31/0463 takes precedence
• CPC Class Codes: H01L 31/0682 back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
• CPC Class Codes: H01L 31/1872 Recrystallisation
• CPC Class Codes: Y02E 10/546 Polycrystalline silicon PV cells
• CPC Class Codes: Y02E 10/547 Monocrystalline silicon PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product
• CPC Class Codes: Y10T 428/12528 Semiconductor component
• CPC Class Codes: Y10T 428/24 Structurally defined web or sheet [e.g., overall dimension, etc.]
• CPC Class Codes: Y10T 428/24058 including grain, strips, or filamentary elements in respective layers or components in angular relation

Abstract

A polycrystalline film of silicon including silicon grains having an aspect ratio, d/t, of more than 1:1, wherein “d” is the grain diameter and “t” is the grain thickness. The polycrystalline film of silicon can be used to form an electronic device, such as a monolithically integrated solar cell having ohmic contacts formed on opposed surfaces or on the same surface of the film. A plurality of solar cells can be monolithically integrated to provide a solar cell module that includes an electrically insulating substrate and at least two solar cells disposed on the substrate in physical isolation from one another. Methods for manufacturing the film, solar cell and solar cell module are also disclosed. The simplified structure and method allow for substantial cost reduction on a mass-production scale, at least in part due to the high aspect ratio silicon grains in the film.

Claims

1. A solar cell comprising:

(a) an electrically insulating substrate;

(b) a first ohmic contact layer formed on or in said substrate, said first ohmic contact layer comprising a highly electronically conductive material having a first conductivity type;

(c) a first layer of doped semiconductor material formed on said first ohmic contact layer and having a first conductivity type the same as that of said first ohmic contact layer;

(d) a second layer of doped semiconductor material formed on said first layer of doped semiconductor material and having a conductivity type opposite to that of said first layer of doped semiconductor material, said first and second layers of doped semiconductor material forming a p-n junction; and

(e) a second ohmic contact layer formed on said second layer of doped semiconductor material in physical isolation from said first ohmic contact layer.

2. The solar cell of

claim 1

, wherein said first ohmic contact layer comprises at least one material selected from the group consisting of silicides and carbides.

3. The solar cell of

claim 1

, wherein said first ohmic contact layer comprises at least one material selected from the group consisting of Si, SiC, B₄C and graphite.

4. The solar cell of

claim 1

, wherein the composition of said first ohmic contact layer is substantially the same as that of said first layer of doped semiconductor material, and said solar cell further comprises a barrier layer between said first ohmic contact layer and said first layer of doped semiconductor material.

5. The solar cell of

claim 4

, wherein said barrier layer has a thickness sufficient to provide (i) mechanical separation of the first ohmic contact layer from the first layer of doped semiconductor material during manufacture of the solar cell, and (ii) electronic conduction therethrough during operation of the solar cell.

6. The solar cell of

claim 5

, wherein said barrier layer comprises a material selected from the group consisting of silicon oxide, silicon dioxide, sialon, silicon nitride, silicon oxynitride, silicon carbide and silicon oxycarbide.

7. A solar cell module, comprising:

(a) an electrically insulating substrate;

(b) at least two solar cells disposed on said substrate in physical isolation from one another, each solar cell comprising;

(i) a first ohmic contact layer formed on or in said substrate,

(ii) a first layer of doped semiconductor material formed on said first ohmic contact layer and having a first conductivity type,

(iii) a second layer of doped semiconductor material formed on said first layer of doped semiconductor material and having a conductivity type opposite to that of said first layer of doped semiconductor material, said first and second layers of doped semiconductor material forming a p-n junction; and

(iv) a second ohmic contact layer formed on said second layer of doped semiconductor material in physical isolation from said first ohmic contact layer; and

(c) an electronically conductive interconnect providing electrical communication between said second ohmic contact layer of one solar cell and said first ohmic contact layer of the other solar cell while maintaining the two solar cells in physical isolation from one another.

8. The solar cell module of

claim 7

, wherein the composition of said first ohmic contact layer is substantially the same as that of said first layer of doped semiconductor material, and said solar cell further comprises a barrier layer formed therebetween.

9. The solar cell module of

claim 8

, wherein said barrier layer has a thickness sufficient to provide (i) mechanical separation of the first ohmic contact layer from the first layer of doped semiconductor material during manufacture of the solar cell module, and (ii) electronic conduction therethrough during operation of the solar cell module.

10. The solar cell module of

claim 8

, wherein said barrier layer comprises a material selected from the group consisting of silicon oxide, silicon dioxide, sialon, silicon nitride, silicon oxynitride, silicon carbide and silicon oxycarbide.

11. The solar cell module of

claim 8

, wherein said first ohmic contact layer comprises a highly electronically conductive material having a first conductivity type the same as that of said first layer of doped semiconductor material.

12. The solar cell module of

claim 11

, wherein said first ohmic contact layer comprises at least one material selected from the group consisting of silicides and carbides.

13. The solar cell module of

claim 11

, wherein said first ohmic contact layer comprises at least one material selected from the group consisting of Si, SiC, B₄C and graphite.

14. A solar cell, comprising:

(a) an electrically insulating substrate;

(b) a first ohmic contact formed on or in said substrate;

(c) a second ohmic contact formed on or in said substrate in spaced juxtaposition with said first ohmic contact; and

(d) a layer of doped semiconductor material disposed on said first and second ohmic contacts, said layer including one of (i) an upper p-region and a lower n-region adjacent said first ohmic contact, and (ii) an upper n-region and a lower p-region adjacent said second ohmic contact, wherein a p-n junction is formed between the upper and lower regions.

15. The solar cell of

claim 14

, wherein said first ohmic contact comprises a highly electronically conductive material having n-type conductivity, and said second ohmic contact comprises a highly electronically conductive material having p-type conductivity.

16. The solar cell of

claim 15

, wherein said first ohmic contact is selected from the group consisting of silicides and carbides.

17. The solar cell of

claim 15

, wherein said first ohmic contact comprises at least one material selected from the group consisting of Si, SiC, B₄C and graphite.

18. The solar cell of

claim 14

, further comprising a barrier layer between said first and second ohmic contacts and said layer of doped semiconductor material.

19. The solar cell of

claim 18

, wherein said barrier layer has a thickness sufficient to provide (i) mechanical separation of the first and second ohmic contacts from the layer of doped semiconductor material during manufacture of the solar cell, and (ii) electronic conduction therethrough during operation of the solar cell.

20. The solar cell of

claim 18

, wherein said barrier layer comprises a material selected from the group consisting of silicon oxide, silicon dioxide, sialon, silicon nitride, silicon oxynitride, silicon carbide and silicon oxycarbide.

21. The solar cell of

claim 14

, wherein each of said first and second ohmic contacts comprises a spine member and a plurality of fingers extending substantially perpendicular to the spine member, and the fingers of said first ohmic contact are interdigitated with the fingers of said second ohmic contact.

22. The solar cell of

claim 14

, further comprising, in said layer of doped semiconductor material, a surface region having a conductivity type opposite to that of said upper region.

23. A solar cell module, comprising:

(a) an electrically insulating substrate; and

(b) at least two solar cells disposed on said substrate, each solar cell comprising;

(i) a first ohmic contact formed on or in said substrate,

(ii) a second ohmic contact formed on or in said substrate in spaced juxtaposition with said first ohmic contact, and

(iii) a layer of doped semiconductor material disposed on said first and second ohmic contacts, said layer including one of (1) an upper p-region and a lower n-region adjacent said first ohmic contact, and (2) an upper n-region and a lower p-region adjacent said second ohmic contact, wherein a p-n junction is formed between said upper and lower regions;

wherein the solar cells are connected physically and electrically only at laterally terminal end portions of said first ohmic contact of one solar cell and said second ohmic contact of the other solar cell.

24. A solar cell module, comprising:

(a) an electrically insulating substrate; and

(b) at least two solar cells disposed on said substrate, each solar cell comprising;

(i) a comb-shaped n+ contact formed on or in said substrate,

(ii) a comb-shaped p+ contact formed on or in said substrate interdigitated with said n+ contact,

(iii) a barrier layer formed on said n+ and p+ contacts,

(iv) a layer of doped semiconductor material disposed on said barrier layer, said layer including one of (1) an upper p-region and a lower n-region adjacent said n+ contact, and (2) an upper n-region and a lower p-region adjacent said p+ contact, wherein a p-n junction is formed between said upper and lower regions;

wherein the solar cells are connected physically and electrically only at laterally terminal end portions of the p+ contact of one solar cell and the n+ contact of the other solar cell.