Actuator for oscillator
First Claim
1. An actuator for an oscillator comprising:
- an electrostatic driven oscillator;
an oscillator driving means for oscillating the electrostatic driven oscillator by outputting a drive signal thereto;
a displacement detecting means for detecting a displacement according to an oscillation of the electrostatic driven oscillator as a displacement signal;
an amplitude adjusting means for controlling the generation of the drive signal outputted from the oscillator driving means based on the detected displacement signal;
the amplitude adjusting means including an alternating voltage component generating means for generating an alternating voltage component of the drive signal having a first amplitude during normal operation and for generating the alternating voltage component of the drive signal having a second amplitude which is larger than the first amplitude during a starting operation and a direct-current voltage component generating means for generating a direct current voltage component of the drive signal controlled to be increased or decreased based on the detected displacement signal;
wherein an oscillation amplitude of the electrostatic driven oscillator is adjusted to be constant by controlling an oscillation force of the electrostatic driven oscillator based on an incorporated signal consisting of a direct-current voltage component and an alternating voltage component having a first amplitude at a normal condition; and
the oscillation amplitude of the electrostatic driven oscillator is increased by driving a larger oscillation drive force to the electrostatic driven oscillator based on the incorporated drive signal consisting of the direct-current voltage component and the alternating voltage component having a second amplitude at a starting condition.
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Accused Products
Abstract
An actuator for an oscillator which is capable of minimizing the fluctuation of the detection error of the oscillation condition of an electrostatic driven oscillator and shortening rise time of the oscillation amplitude of the electrostatic driven oscillator during starting. An actuator oscillates a drive frame and a detecting frame in the X-direction by outputting the drive signal to an electrode and detects the displacement of the drive frame in the X-direction as the displacement signal. The actuator generates a direct-current voltage component of the drive signal controlled to be increased or decreased based on the detected displacement signal and an alternating voltage component of the drive signal having a constant amplitude to maintain the constancy of the oscillation amplitude of the drive frame based on the detected displacement signal. During starting, the actuator generates an alternating voltage component of the drive signal having a larger amplitude compared to at normal operation condition.
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Citations
12 Claims
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1. An actuator for an oscillator comprising:
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an electrostatic driven oscillator;
an oscillator driving means for oscillating the electrostatic driven oscillator by outputting a drive signal thereto;
a displacement detecting means for detecting a displacement according to an oscillation of the electrostatic driven oscillator as a displacement signal;
an amplitude adjusting means for controlling the generation of the drive signal outputted from the oscillator driving means based on the detected displacement signal;
the amplitude adjusting means including an alternating voltage component generating means for generating an alternating voltage component of the drive signal having a first amplitude during normal operation and for generating the alternating voltage component of the drive signal having a second amplitude which is larger than the first amplitude during a starting operation and a direct-current voltage component generating means for generating a direct current voltage component of the drive signal controlled to be increased or decreased based on the detected displacement signal;
wherein an oscillation amplitude of the electrostatic driven oscillator is adjusted to be constant by controlling an oscillation force of the electrostatic driven oscillator based on an incorporated signal consisting of a direct-current voltage component and an alternating voltage component having a first amplitude at a normal condition; and
the oscillation amplitude of the electrostatic driven oscillator is increased by driving a larger oscillation drive force to the electrostatic driven oscillator based on the incorporated drive signal consisting of the direct-current voltage component and the alternating voltage component having a second amplitude at a starting condition. - View Dependent Claims (2, 3, 5, 6, 7, 8, 9, 10, 11, 12)
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4. An actuator for oscillator comprising:
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an oscillator driving means for oscillating the electrostatic driven oscillator by outputting a drive signal thereto;
a displacement detecting means for detecting a displacement according to an oscillation of the electrostatic driven oscillator as a displacement signal; and
an amplitude adjusting means for controlling the generation of the drive signal outputted from the oscillator driving means based on the detected displacement signal;
the amplitude adjusting means including an alternating voltage component generating means for generating the alternating voltage component of the drive signal having a constant amplitude by phase-shifting and amplifying the displacement signal by a first amplification ratio during the normal operation and for generating the alternating voltage component of the drive signal by amplifying the displacement signal by a seconds amplification ratio which is larger than the first amplification ratio during the starting condition and including a direct-current voltage component generating means for generating the direct-current voltage component of the drive signal controlled to be increased or decreased based on the detected displacement signal;
wherein an oscillation amplitude of the electrostatic driven oscillator is adjusted to be constant by controlling the oscillation drive force of the electrostatic driven oscillator based on an incorporated signal consisting of the direct-current voltage component and the alternating voltage component having a constant amplitude amplified by the first amplification ratio at the normal operation; and
wherein the oscillation amplitude of the electrostatic driven oscillator is increased by supplying a larger oscillation drive force relative to the electrostatic driven oscillator based on an incorporated drive signal consisting of the direct-current voltage component and the alternating voltage component amplified by the second amplification ratio during starting.
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Specification