Manufacturing method for multilayer ceramic device
First Claim
1. A method of manufacturing a multilayer ceramic device comprising the steps of:
- preparing a ceramic material containing a glass component;
preparing a shrinkage-suppressing inorganic material having a higher sintering temperature than said ceramic material;
forming, with said ceramic material, first glass-ceramic green sheets having first openings for defining a cavity and second glass-ceramic green sheets which do not have openings at least at a position where said first openings are provided;
laminating said first glass-ceramic green sheets and said second glass-ceramic green sheets to obtain a green sheet laminate having said cavity formed by said first openings, said cavity having an open surface in at least one of the surfaces of said green sheet laminate in the laminating direction;
forming shrinkage-suppressing layers with said shrinkage-suppressing inorganic material on both surfaces of said green sheet laminate in the laminating direction, thereby obtaining a composite laminate in which both surfaces of said green sheet laminate are covered by said shrinkage-suppressing layers;
pressing said composite laminate in the laminating direction; and
sintering said composite laminate;
wherein one of said shrinkage-suppressing layers which is formed over the surface in which said open surface of said cavity is provided is formed so as to have a second opening for exposing said open surface of said cavity at the step of obtaining said composite laminate, and at the step of pressing said composite laminate, the bottom portion of said cavity is pressed via said second opening while the surrounding region of the cavity is pressed.
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Abstract
A method of manufacturing a multilayer ceramic device includes forming first and second glass-ceramic green sheets from a ceramic material containing glass by laminating the material to form a green sheet laminate having a cavity with an open surface at one surface thereof. Then, shrinkage-suppressing layers which are formed with shrinkage-suppressing inorganic material having a higher sintering temperature than the ceramic material are applied over the surfaces of the green sheet laminate. Thus, a composite laminate is obtained. Then, the composite laminate is pressed in the laminating direction such that the bottom portion of the cavity receives the same amount of pressure as the surrounding region of the cavity via an opening. Then, the composite laminate is fired, and the shrinkage-suppressing layers are removed.
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Citations
20 Claims
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1. A method of manufacturing a multilayer ceramic device comprising the steps of:
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preparing a ceramic material containing a glass component;
preparing a shrinkage-suppressing inorganic material having a higher sintering temperature than said ceramic material;
forming, with said ceramic material, first glass-ceramic green sheets having first openings for defining a cavity and second glass-ceramic green sheets which do not have openings at least at a position where said first openings are provided;
laminating said first glass-ceramic green sheets and said second glass-ceramic green sheets to obtain a green sheet laminate having said cavity formed by said first openings, said cavity having an open surface in at least one of the surfaces of said green sheet laminate in the laminating direction;
forming shrinkage-suppressing layers with said shrinkage-suppressing inorganic material on both surfaces of said green sheet laminate in the laminating direction, thereby obtaining a composite laminate in which both surfaces of said green sheet laminate are covered by said shrinkage-suppressing layers;
pressing said composite laminate in the laminating direction; and
sintering said composite laminate;
wherein one of said shrinkage-suppressing layers which is formed over the surface in which said open surface of said cavity is provided is formed so as to have a second opening for exposing said open surface of said cavity at the step of obtaining said composite laminate, and at the step of pressing said composite laminate, the bottom portion of said cavity is pressed via said second opening while the surrounding region of the cavity is pressed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification