Magnetically actuated torsional micro-mechanical mirror system

• US 20010022682A1
• Filed: 01/03/2001
• Published: 09/20/2001
• Est. Priority Date: 08/27/1997
• Status: Active Grant

• Current Assignee: Google LLC (Alphabet Inc.), Northeastern University
• Original Assignee: MicroOptical Corporation
• Inventors: Rensing, Noa More, Spitzer, Mark Bradley, Zavracky, Paul Martin, McClelland, Robert William, Aquilino, Paul Daniel
• Granted Patent: US 6,538,799 B2
• Time in Patent Office: Days
• US Class Current: 359/280
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means

Abstract

A torsional micro-mechanical mirror system includes a mirror assembly rotatably supported by a torsional mirror support assembly for rotational movement over and within a cavity in a base. The cavity is sized sufficiently to allow unimpeded rotation of the mirror assembly. The mirror assembly includes a support structure for supporting a reflective layer. The support structure is coplanar with and formed from the same wafer as the base. The torsional mirror support assembly includes at least one torsion spring formed of an electroplated metal. An actuator assembly is operative to apply a driving force to torsionally drive the torsional mirror support assembly, whereby torsional motion of the torsional mirror support assembly causes rotational motion of the mirror assembly. In another embodiment, a magnetic actuator assembly is provided to drive the mirror assembly. Other actuator assemblies are operative to push on the mirror assembly or provide electrodes spaced across the gap between the mirror assembly and the base. A process for fabricating the torsional micro-mirror is provided. The torsional micro-mirror is useful in various applications such as in biaxial scanner or video display systems.

Claims

1. A torsional micro-mechanical mirror system comprising:

a base having a cavity formed therein;

a mirror assembly including a magnetic material thereon to provide a magnetic moment;

a torsional mirror support assembly comprising at least one torsional spring supporting the mirror for rotational movement over the cavity; and

a magnetic actuator assembly operative in conjunction with the magnetic material on the mirror to rotationally drive the mirror.

2. The system of

claim 1

, wherein the magnetic actuator assembly comprises an electromagnet disposed to exert a driving force on the magnetic material.

3. The system of

claim 1

, wherein the magnetic material covers a surface of the mirror facing the cavity.

4. The system of

claim 1

, wherein the magnetic material is applied to a surface of the mirror assembly in a pattern preselected to improve the magnetic and mechanical performance of the system.

5. The system of

claim 1

, wherein the magnetic material is applied to a surface of the mirror assembly near an axis of rotation of the mirror assembly in a pattern preselected to minimize moment of inertia and lowering of resonant frequency.

6. The system of

claim 1

, wherein the magnetic material comprises a conduction coil formed on a surface of the mirror assembly, whereby a magnetic moment is formed when current is established within the conduction coil, and the actuator assembly includes a permanent magnet having a magnetic field disposed to interact with the magnetic moment of the conduction coil.

7. The system of

claim 1

, wherein the magnetic material is formed along an edge of the mirror assembly, and the actuator assembly comprises an electromagnet disposed out of the plane of the mirror assembly.

8. The system of

claim 1

, wherein the magnetic material has a permanent magnetic moment.

9. The system of

claim 1

, wherein the magnetic material has a temporary magnetic moment upon application of a magnetic field.