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Semiconductor physical quantity sensor

  • US 20010025530A1
  • Filed: 03/09/2001
  • Published: 10/04/2001
  • Est. Priority Date: 03/16/2000
  • Status: Active Grant
First Claim
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1. A semiconductor physical quantity sensor comprising:

  • a supporting substrate;

    a movable portion supported to the supporting substrate and having a weight portion movable in a displacement direction and first and second movable electrodes provided on both sides of the weight portion and protruding from the weight portion perpendicularly to the displacement direction;

    a fixed portion provided on the supporting substrate and electrically divided from the moving portion by a trench, the fixed portion having first and second fixed electrodes respectively protruding toward the movable portion interposed therebetween, extending in parallel with the first and second movable electrodes and defining first and second detection intervals at the both sides of the weight portion;

    wherein an applied physical quantity is detected based on changes in capacitances generated between the first and second movable electrodes and the first and second fixed electrodes when the first and second movable electrodes move responsive to the applied physical quantity;

    wherein an electrostatic attracting force generated between the first movable electrode and the fist fixed electrode acts in a direction opposite to that in which an electrostatic attracting force generated between the second movable electrode and the second fixed electrode acts;

    wherein one of the first movable electrode and the first fixed electrode has protrusions protruding from opposing side faces thereof in parallel with the displacement direction, one of the side faces facing the first detection interval.

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