DIFFRACTIVE OPTICAL ELEMENT AND METHOD OF MANUFACTURE OF THE SAME

• US 20010026399A1
• Filed: 09/23/1999
• Published: 10/04/2001
• Est. Priority Date: 09/24/1998
• Status: Abandoned Application

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: TERADA, JUNJI, NAKABAYASHI, MASAAKI, HAYASHI, SENICHI
• Application Number:
  US09/401,660
• Publication Number:
  US 20010026399A1
• Time in Patent Office: Days
• US Class Current: 359/576
• CPC Class Codes: G02B 5/1857 using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Abstract

A diffractive optical element having plural diffraction grating surfaces accumulated, wherein a pair of diffraction grating surfaces are positioned so that a protrusion and/or a recess formed on an outside of one diffraction grating surface engages with a recess and/or a protrusion formed on an outside of the other diffraction grating surface, and wherein the pair of diffraction grating surfaces are defined on materials having different refractive indices and different dispersions and being formed into a kinoform, or a shape and a height of blazed or binary, close to it, such that a largest optical path difference to be applied to light rays passing through the diffraction grating surfaces with respect to plural wavelengths becomes equal to a multiple, by an integral number, of the wavelength.

Claims

1. A diffractive optical element having plural diffraction grating surfaces accumulated,

characterized in that:

a pair of diffraction grating surfaces are positioned so that a protrusion and/or a, recess formed on an outside of one diffraction grating surface engages with a recess and/or a protrusion formed on an outside of the other diffraction grating surface; and

that the pair of diffraction grating surfaces are defined on materials having different refractive indices and different dispersions and being formed into a kinoform, or a shape and a height of blazed or binary, close to it, such that a largest optical path difference to be applied to light rays passing through the diffraction grating surfaces with respect to plural wavelengths becomes equal to a multiple, by an integral number, of the wavelength.

5. A diffractive optical element according to any one of claims 1-4, wherein the pair of diffraction gratings are disposed opposed to each other with a space such as by an air interposed therebetween.

6. A diffractive optical element according to any one of claims 1-5, wherein the protrusion and the recess have a sectional shape of one of a triangle shape, a trapezoidal shape and a semi-circular shape.

9. A method of manufacturing a diffractive optical element as recited in any one of claims 1-8, characterized by a process for fitting the protrusion as formed on the one diffraction grating into the recess as formed on the other diffraction grating.

10. A method of manufacturing a diffractive optical element as recited in any one of claims 1-8, characterized by a process in which, after one diffraction grating surface is formed, another diffraction grating surface is formed by use of a mold, wherein a protrusion and/or a recess formed on the one diffraction grating surface is fitted into a recess and/or a protrusion formed on the mold for the other diffraction grating surface, whereby these diffraction grating surfaces are mutually positioned and molding of the other diffraction grating surface is performed.

13. An optical system having a diffractive optical element according to any one of claims 1-8.

14. An optical system having a diffractive optical element as manufactured in accordance with a method as recited in claims 9 or 10.

2. A diffractive optical element having plural diffraction grating surfaces accumulated,

characterized In that:

a pair of diffraction grating surfaces are positioned so that a protrusion and/or a recess formed outside an optically effective region of one diffraction grating surface engages with a recess and/or a protrusion formed outside an optically effective region of the other diffraction grating surface; and

that the pair of diffraction grating surfaces are defined on materials having different refractive indices and different dispersions and being formed into a kinoform, or a shape and a height close to it, such that a largest optical path difference to be applied to light rays passing through the diffraction grating surfaces with respect to each of plural wavelengths becomes equal to a multiple, by an integral number, of the wavelength.

3. A diffractive optical element having plural diffraction grating surfaces accumulated,

characterized in that:

a pair of diffraction grating surfaces are positioned so that a protrusion and/or a recess formed on an outside of one diffraction grating surface engages with a recess and/or a protrusion formed on an outside of the other diffraction grating surface; and

that the pair of diffraction grating surfaces are defined on materials having different refractive indices and different dispersions and being formed into a kinoform, or a shape and a height close to it, such that a diffraction efficiency of diffraction light of a particular order, such as one of positive and negative first order, with respect to plural wavelengths, becomes equal to or nearly equal to 100%.

4. A diffractive optical element having plural diffraction grating surfaces accumulated,

characterized in that:

a pair of diffraction grating surfaces are positioned so that a protrusion and/or a recess formed outside an optically effective region of one diffraction grating surface engages with a recess and/or a protrusion formed outside an optically effective region of the other diffraction grating surface; and

that the pair of diffraction grating surfaces are defined on materials having different refractive indices and different dispersions and being formed into a kinoform, or a shape and a height close to it, such that a diffraction efficiency of diffraction light of a particular order, such as one of positive and negative first order, with respect to plural wavelengths, becomes equal to or nearly equal to 100%.

7. A diffractive optical element having plural diffraction grating surfaces accumulated,

characterized in that:

a pair of diffraction grating surfaces are mutually positioned so that a protrusion, and/or a recess having a sectional shape of one of a triangular shape, a trapezoidal shape, and a semi-circular shape, formed on one diffraction grating surface, engages with a recess and/or a protrusion having a sectional shape of one of a triangular shape, a trapezoidal shape, and a semi-circular shape, formed on the other diffraction grating surface.

8. A diffractive optical element having plural diffraction grating surfaces accumulated,

characterized in that:

a pair of diffraction grating surfaces are mutually positioned so that a protrusion and/or a recess having a sectional shape of one of a triangular shape, a trapezoidal shape, and a semi-circular shape, formed outside an optically effective region of one diffraction grating surface engages with a recess and/or a protrusion having a sectional shape of one of a triangular shape, a trapezoidal shape, and a semi-circular shape, formed outside an optically effective region of the other diffraction grating surfaces.

11. A method of manufacturing a diffractive optical element, comprising the steps of:

forming, upon a substrate, a first diffraction grating and a recess and/or a protrusion;

preparing a mold having a protrusion and/or a recess to be engaged with the recess and/or the protrusion formed on the substrate, as well as a second diffraction grating pattern; and

positioning the diffraction grating on the substrate and the diffraction grating pattern with each other by engaging the recess and/or the protrusion of the substrate with the protrusion and/or the recess of the mold.

12. An optical system having a diffractive optical element as manufactured in accordance with a method as recited in

claim 11

.