Method for preparation of sintered body of rare earth oxide

• US 20010027159A1
• Filed: 02/15/2001
• Published: 10/04/2001
• Est. Priority Date: 03/07/2000
• Status: Active Grant

• Current Assignee: Shin-Etsu Chemical Company Limited
• Original Assignee: Shin-Etsu Chemical Company Limited
• Inventors: Kaneyoshi, Masami
• Granted Patent: US 6,410,471 B2
• Time in Patent Office: Days
• US Class Current: 501/152
• CPC Class Codes: C04B 35/44 based on aluminates
• CPC Class Codes: C04B 35/50 based on rare-earth compounds non-oxide rare earth compounds C04B35/5156

Abstract

Disclosed is a method for the preparation of a high-quality sintered body of a rare earth oxide or a composite oxide of a rare earth oxide and an adjuvant oxide such as aluminum oxide. The method comprises shaping a rare earth oxide powder characterized by specified particle diameter distribution values of D₅₀ and D₉₀ and a specified specific surface area or a powder blend of the rare earth oxide and adjuvant oxide into a powder compact and subjecting the powder compact to a sintering heat treatment at a specified sintering temperature by increasing and decreasing the temperature up to and from the sintering temperature each at a rate not exceeding a specified upper limit.

Claims

1. A method for the preparation of a sintered body of a rare earth oxide which comprises the steps of:

(a) shaping a powder of the rare earth oxide, of which the D₅₀ value of the particle diameter distribution does not exceed 2.0 μ

m, the D₉₀ value of the particle diameter distribution does not exceed 3.0 μ

m and the specific surface area is in the range from 5 to 20 m²/g, into a powder compact; and

(b) subjecting the powder compact to a heat treatment for sintering at a sintering temperature of 1000°

C. or higher for at least 1 hour, in which the rate of temperature elevation in the range from 500°

C. to the sintering temperature does not exceed 500°

C. per hour and the rate of temperature decrease from the sintering temperature does not exceed 600°

C. per hour.

2. The method for the preparation of a sintered body of a rare earth oxide as claimed in

claim 1

in which the D₅₀ value of the particle diameter distribution of the rare earth oxide powder does not exceed 1.5 μ

m.

3. The method for the preparation of a sintered body of a rare earth oxide as claimed in

claim 1

in which the D₅₀ value of the particle diameter distribution of the rare earth oxide powder is in the range from 0.9 to 1.3 μ

m.

4. The method for the preparation of a sintered body of a rare earth oxide as claimed in

claim 1

in which the D value of the particle diameter distribution of the rare earth oxide powder does not exceed 2.7 μ

m.

5. The method for the preparation of a sintered body of a rare earth oxide as claimed in

claim 1

in which the D₉₀ value of the particle diameter distribution of the rare earth oxide powder is in the range from 1.9 to 2.3 μ

m.

6. The method for the preparation of a sintered body of a rare earth oxide as claimed in

claim 1

in which the specific surface area of the rare earth oxide powder is in the range from 7 to 18 m²/g.

7. The method for the preparation of a sintered body of a rare earth oxide as claimed in

claim 1

in which the specific surface area of the rare earth oxide powder is in the range from 10 to 15 m²/g.

8. The method for the preparation of a sintered body of a rare earth oxide as claimed in

claim 1

in which the D′

₅₀ value of the pore diameter distribution of the rare earth oxide powder does not exceed 20 nm.

9. The method for the preparation of a sintered body of a rare earth oxide as claimed in

claim 1

in which the sintering temperature is in the range from 1200 to 1900°

C.

10. The method for the preparation of a sintered body of a rare earth oxide as claimed in

claim 1

in which the sintering temperature is in the range from 1400 to 1800°

C.

11. The method for the preparation of a sintered body of a rare earth oxide as claimed in

claim 1

in which shaping of the rare earth oxide powder into a powder compact is conducted by hydrostatic compression.

12. The method for the preparation of a sintered body of a rare earth oxide as claimed in

claim 11

in which the pressure of hydrostatic compression is at least 100 MPa.

13. The method for the preparation of a sintered body of a rare earth oxide as claimed in

claim 11

in which the pressure of hydrostatic compression is at least 150 MPa.

14. The method for the preparation of a sintered body of a rare earth oxide as claimed in

claim 1

in which the rate of temperature elevation is in the range from 150 to 400°

C. per hour.

15. A method for the preparation of a sintered body of a rare earth oxide-based composite oxide with a n adjuvant oxide which comprises the steps of:

(a) blending a powder of the rare earth oxide, of which the D₅₀ value of the particle diameter distribution does not exceed 2.0 μ

m, the D₉₀ value of the particle diameter distribution does not exceed 3.0 μ

m and the specific surface area is in the range from 5 to 20 m²/g, and an adjuvant oxide of an element selected from the group consisting of magnesium, aluminum, silicon, titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, gallium, germanium, zirconium, niobium, molybdenum, indium, tin, hafnium, tantalum and tungsten to give a powder blend;

(b) shaping the powder blend into a powder compact; and

(c) subjecting the powder compact to a heat treatment for sintering at a sintering temperature of 1000°

C. or higher for at least 1 hour, in which the rate of temperature elevation in the range from 500°

C. to the sintering temperature does not exceed 500°

C. per hour and the rate of temperature decrease from the sintering temperature does not exceed 600°

C. per hour.

16. The method for the preparation of a sintered body of a rare earth oxide-based composite oxide with an adjuvant oxide as claimed in

claim 15

in which the amount of the rare earth oxide powder in the powder blend is at leasr 40% by weight based on the total amount of the powder blend.

17. The method for the preparation of a sintered body of a rare earth oxide-based composite oxide with an adjuvant oxide as claimed in

claim 15

in which the adjuvant oxide is selected from the group consisting of the oxides of iron, aluminum, silicon, titanium, gallium and zirconium.