Multi-beam exposure apparatus using a multi-axis electron lens, fabrication method a semiconductor device
First Claim
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1. An electron beam exposure apparatus for exposing a wafer with a plurality of electron beams, comprising:
- a plurality of electron guns operable to generate said plurality of electron beams;
a voltage controller, electrically connected to said plurality of electron guns, operable to apply different voltages to said plurality of electron guns; and
a multi-axis electron lens operable to converge said plurality of electron beams independently of each other.
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Abstract
An electron beam exposure apparatus for exposing a wafer with a plurality of electron beams, includes: a plurality of electron guns operable to generate the electron beams; a voltage controller, electrically connected to the electron guns, operable to apply different voltages to the electron guns; and a multi-axis electron lens operable to converge the electron beams independently of each other.
123 Citations
21 Claims
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1. An electron beam exposure apparatus for exposing a wafer with a plurality of electron beams, comprising:
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a plurality of electron guns operable to generate said plurality of electron beams;
a voltage controller, electrically connected to said plurality of electron guns, operable to apply different voltages to said plurality of electron guns; and
a multi-axis electron lens operable to converge said plurality of electron beams independently of each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A fabrication method of a semiconductor device on a wafer, comprising:
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applying different voltages to a plurality of electron guns to generate a plurality of electron beams;
performing focus adjustments with respect to said wafer for said plurality of electron beams by using a multi-axis electron lens for converging said electron beams independently of each other; and
exposing a pattern onto said wafer by illuminating said wafer with said plurality of electron beams.
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Specification