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Semiconductor device analyzer, method for analyzing/manufacturing semiconductor device, and storage medium storing program for analyzing semiconductor device

  • US 20010029601A1
  • Filed: 03/26/2001
  • Published: 10/11/2001
  • Est. Priority Date: 03/27/2000
  • Status: Active Grant
First Claim
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1. A semiconductor device analyzer comprising:

  • a substrate model reading module configured to read, from input data to the semiconductor device analyzer, a substrate network model of three-dimensional meshes representing a substrate of a semiconductor device at a surface of and in which circuit elements are merged;

    a Y-matrix entry module configured to prepare a Y-matrix from the substrate network model and express each element of the Y-matrix with a polynomial of differential operator “

    s”

    ;

    a discriminating module configured to discriminate internal nodes to be eliminated from and external nodes to be left in the substrate network model; and

    a matrix reduction module configured to reduce the Y-matrix by eliminating the internal nodes.

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