Semiconducting system and production method
First Claim
1. A semiconductor device comprising;
- (1) multiple layers of copper wires formed in an insulation film, (2) a wire protective film covering the top of said copper wire, and (3) a barrier film surrounding the side and bottom of said copper wiring;
said semiconductor device characterized in that at least one of said wiring protective film and barrier film is formed of cobalt alloy film containing at least one of chromium, molybdenum, tungsten, rhenium, thallium and phosphorus, and boron.
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Accused Products
Abstract
The object of the present invention is to prevent rise of resistance due to oxidation of the copper wiring and diffusion of copper.
The above object can be attained by the present invention providing a semiconductor device which contains a wire protective film 1 covering the top of the copper wiring 2 formed in the insulation film and a barrier film surrounding the side and bottom of the copper wiring; wherein the wire protective film and/or barrier film is formed with cobalt alloy film containing (1) cobalt, (2) at least one of chromium, molybdenum, tungsten, rhenium, thallium and phosphorus, and (3) boron, as in the case of other embodiments.
377 Citations
12 Claims
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1. A semiconductor device comprising;
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(1) multiple layers of copper wires formed in an insulation film, (2) a wire protective film covering the top of said copper wire, and (3) a barrier film surrounding the side and bottom of said copper wiring;
said semiconductor device characterized in that at least one of said wiring protective film and barrier film is formed of cobalt alloy film containing at least one of chromium, molybdenum, tungsten, rhenium, thallium and phosphorus, and boron. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A semiconductor device production method wherein said semiconductor device comprises;
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(1) multiple layers of copper wires formed in the insulation film, (2) a wire protective film covering the top of said copper wire, and (3) a barrier film surrounding the side and bottom of said copper wiring, wherein at least one of said wiring protective film and barrier film is virtually formed of cobalt alloy film containing at least one of chromium, molybdenum, tungsten, rhenium, thallium and phosphorus, and boron made by electroless plating.
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10. A semiconductor device production method wherein said semiconductor device comprises;
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(1) multiple layers of copper wires formed in the insulation film, (2) a wire protective film covering the top of said copper wire, and (3) a barrier film surrounding the side and bottom of said copper wiring;
said semiconductor device production method further characterized in that it has a step of forming insulation film serving as etch stop layer on the surface of the insulation film where copper wiring is formed, and said wire protective film and/or barrier film is formed by electroless plating method as cobalt alloy film containing (1) cobalt, (2) at least one of chromium, molybdenum, tungsten, rhenium, thallium and phosphorus, and (3) boron. - View Dependent Claims (11, 12)
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Specification