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Position sensing with improved linearity

  • US 20010032508A1
  • Filed: 01/18/2001
  • Published: 10/25/2001
  • Est. Priority Date: 01/20/2000
  • Status: Active Grant
First Claim
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1. A position sense interface for a micro-mechanical element, comprising:

  • at least a first and a second electrically decoupled sense capacitors; and

    position detection circuitry comprising a differential charge integrator with input-sensed, output driven feedback.

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