×

Oil-less differential pressure sensor

  • US 20010032515A1
  • Filed: 02/09/2001
  • Published: 10/25/2001
  • Est. Priority Date: 02/11/2000
  • Status: Active Grant
First Claim
Patent Images

1. A pressure sensor for measuring a pressure difference between two fluids, the pressure sensor comprising:

  • a diaphragm support member having an outer periphery and an opening formed therethrough;

    a first diaphragm covering one side of the opening through the support member;

    a second diaphragm covering the other some of the opening through the support member; and

    a moveable member extending through the opening and coupled between the first and second diaphragms, wherein the moveable member moves in response to a difference between pressures applied to the first and second diaphragms.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×