Method for evaluating pattern defects on a wafer surface
First Claim
1. A method for evaluating pattern defects on a wafer surface, in which surface data of an individual image field (4) of the wafer surface that have just been acquired are compared to electronically stored reference data that have been generated from previously acquired surface data of identically located individual image fields (4) from a plurality of wafer surfaces of the same production series and pattern.
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Abstract
The invention concerns a method for evaluating pattern defects on a wafer surface, comprising the following steps: acquiring the surface data of a plurality of individual image fields (4) of a series-produced wafer (1); storing the data in a reference data set and making it available as reference data for the inspection of further wafers of the same series; inspecting, successively in time, the individual image fields (4) on the surface of a wafer (1) presently being examined; retrieving from the reference data set a reference datum corresponding to the respective individual image field (4) presently being inspected; comparing the surface of each individual image field (4) currently being inspected to the corresponding reference datum; if one or more deviations are identified, subsequently classifying the deviations into critical and noncritical defects in terms of the functionality of the chip; and simultaneously updating or adding to the reference data set.
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17 Claims
- 1. A method for evaluating pattern defects on a wafer surface, in which surface data of an individual image field (4) of the wafer surface that have just been acquired are compared to electronically stored reference data that have been generated from previously acquired surface data of identically located individual image fields (4) from a plurality of wafer surfaces of the same production series and pattern.
Specification