Graded thin films
First Claim
1. A method of forming a thin film with a varying composition in an integrated circuit comprising:
- placing a substrate in a reaction chamber;
introducing first and second vapor phase reactants in alternate and temporally separated pulses to the substrate in a plurality of deposition cycles; and
introducing varying amounts of a third vapor phase reactant to the substrate during said plurality of deposition cycles.
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Accused Products
Abstract
Thin films are formed by formed by atomic layer deposition, whereby the composition of the film can be varied from monolayer to monolayer during cycles including alternating pulses of self-limiting chemistries. In the illustrated embodiments, varying amounts of impurity sources are introduced during the cyclical process. A graded gate dielectric is thereby provided, even for extremely thin layers. The gate dielectric as thin as 2 nm can be varied from pure silicon oxide to oxynitride to silicon nitride. Similarly, the gate dielectric can be varied from aluminum oxide to mixtures of aluminum oxide and a higher dielectric material (e.g., ZrO2) to pure high k material and back to aluminum oxide. In another embodiment, metal nitride (e.g., WN) is first formed as a barrier for lining dual damascene trenches and vias. During the alternating deposition process, copper can be introduced, e.g., in separate pulses, and the copper source pulses can gradually increase in frequency, forming a graded transition region, until pure copper is formed at the upper surface. Advantageously, graded compositions in these and a variety of other contexts help to avoid such problems as etch rate control, electromigration and non-ohmic electrical contact that can occur at sharp material interfaces.
806 Citations
58 Claims
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1. A method of forming a thin film with a varying composition in an integrated circuit comprising:
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placing a substrate in a reaction chamber;
introducing first and second vapor phase reactants in alternate and temporally separated pulses to the substrate in a plurality of deposition cycles; and
introducing varying amounts of a third vapor phase reactant to the substrate during said plurality of deposition cycles. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A thin film in an integrated circuit having a thickness of less than 100 Å
- defined between an upper surface and a lower surface, said thin film having a controlled and varying composition between the upper surface and the lower surface.
- View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57)
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58. A method of forming an integrated circuit, comprising depositing a layer having a graded concentration of an impurity from a lower surface to an upper surface by exposing a substrate to alternating surface reactions of vapor-phase reactants.
Specification