Method for transferring porous layer, method for making semiconductor devices, and method for making solar battery
First Claim
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1. A method for transferring a porous layer comprising:
- forming a porous layer on one side of a crystalline silicon member by anodization;
fixing a supporting substrate onto the surface of the porous layer; and
applying force to any one of the supporting substrate and the porous layer, whereby at least part of the porous layer is cleaved from the crystalline silicon member and is transferred onto the supporting substrate.
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Abstract
A method for transferring a porous layer includes forming a porous layer on one side of a crystalline silicon member by anodization, fixing a supporting substrate onto the surface of the porous layer, and applying force to any one of the supporting substrate and the porous layer, whereby at least part of the porous layer is cleaved from the crystalline silicon member and is transferred onto the supporting substrate. The crystalline silicon member can be recycled and this method is suitable for mass production of semiconductor devices or solar batteries at low cost.
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Citations
22 Claims
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1. A method for transferring a porous layer comprising:
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forming a porous layer on one side of a crystalline silicon member by anodization;
fixing a supporting substrate onto the surface of the porous layer; and
applying force to any one of the supporting substrate and the porous layer, whereby at least part of the porous layer is cleaved from the crystalline silicon member and is transferred onto the supporting substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method for making a semiconductor device comprising:
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forming a porous layer on one side of a crystalline silicon member by anodization;
fixing a supporting substrate onto the surface of the porous layer;
applying force to any one of the supporting substrate and the porous layer, whereby at least part of the porous layer is cleaved from the crystalline silicon member and is transferred onto the supporting substrate; and
a crystalline semiconductor layer onto the transferred porous layer. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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22. A method for making a solar battery comprising:
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forming a porous layer on one side of a crystalline silicon member by anodization;
fixing a supporting substrate onto the surface of the porous layer;
applying force to any one of the supporting substrate and the porous layer, whereby at least part of the porous layer is cleaved from the crystalline silicon member and is transferred onto the supporting substrate; and
forming a crystalline semiconductor layer onto the transferred porous layer.
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Specification