METHOD AND APPARATUS FOR COMBINED PARTICLE LOCATION AND REMOVAL
First Claim
1. A method for removing one or more particles from a surface of an object, the method comprising the steps of:
- (a) detecting the one or more particles on the surface of the object, (b) locating the one or more particles on the surface of the object by generating location data in response to the detecting step, and (c) directing focused energy on the one or more located particles based upon their location for removing the located particles from the surface.
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Accused Products
Abstract
A method for removing one or more particles from a surface of an object is provided. The method has first and second steps of detecting and locating the one or more particles on the surface of the object. In a third step, focused energy is directed onto one or more of the detected particles to break a bond energy between the one or more particles and the surface thereby removing the one or more particles from the surface. In preferred variations of the method of the present invention, the object is a semiconductor wafer and the directed focused energy is in the form of a laser. Also provided is an apparatus for removing the plurality of particles from the surface of the object. The apparatus includes a detector for detecting and locating the plurality of particles on the surface of the object, and a laser for directing focused energy on one or more of the detected particles to break a bond energy between the one or more particles and the surface thereby removing the one or more particles from the surface.
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Citations
34 Claims
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1. A method for removing one or more particles from a surface of an object, the method comprising the steps of:
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(a) detecting the one or more particles on the surface of the object, (b) locating the one or more particles on the surface of the object by generating location data in response to the detecting step, and (c) directing focused energy on the one or more located particles based upon their location for removing the located particles from the surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An apparatus for removing one or more particles from a surface of an object, the apparatus comprising:
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means for detecting the one or more particles on the surface of the object, means for locating the one or more particles on the surface of the object which generates location data in response to the means for detecting, and means for directing focused energy on the one or more located particles based upon their location for removing the one or more located particles from the surface. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification