Polishing apparatus
First Claim
1. A polishing apparatus having a multi-head, comprising:
- a polishing table having a polishing surface;
a plurality of top rings for holding workpieces and pressing the workpieces against said polishing surface;
a carousel for supporting said top rings and indexing said top rings;
a rotary transporter disposed in a position which can be accessed by said top rings and having a plurality of portions positioned on a predetermined circumference from a center of rotation of said rotary transporter for holding the workpieces, said rotary transporter having an indexing function for indexing said plurality of portions; and
a pusher for transferring the workpieces between said rotary transporter and said top rings.
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Accused Products
Abstract
A multi-head type polishing apparatus has a plurality of top rings for holding workpieces with respect to a single polishing table. A polishing apparatus includes a polishing table having a polishing surface, a plurality of top rings for holding workpieces and pressing the workpieces against the polishing surface, and a carousel for supporting the top rings and indexing the top rings. The polishing apparatus further includes a rotary transporter disposed in a position which can be accessed by the top rings and having a plurality of portions positioned on a predetermined circumference from a center of rotation of the rotary transporter for holding the workpieces, and a pusher for transferring the workpieces between the rotary transporter and the top rings.
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Citations
17 Claims
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1. A polishing apparatus having a multi-head, comprising:
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a polishing table having a polishing surface;
a plurality of top rings for holding workpieces and pressing the workpieces against said polishing surface;
a carousel for supporting said top rings and indexing said top rings;
a rotary transporter disposed in a position which can be accessed by said top rings and having a plurality of portions positioned on a predetermined circumference from a center of rotation of said rotary transporter for holding the workpieces, said rotary transporter having an indexing function for indexing said plurality of portions; and
a pusher for transferring the workpieces between said rotary transporter and said top rings. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A polishing apparatus having a multi-head, comprising:
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a polishing table having a polishing surface;
a plurality of top rings for holding workpieces and pressing the workpieces against said polishing surface;
a carousel for supporting said top rings and indexing said top rings;
a plurality of cleaning apparatuses for cleaning the workpieces which have been polished;
a transfer mechanism for transferring said polished workpieces between said cleaning apparatuses; and
a workpiece station having workpiece trays for holding the workpieces in a standby state while the workpieces are cleaned in a plurality of stages through said cleaning apparatuses or before the workpieces are cleaned. - View Dependent Claims (9, 10)
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11. A polishing apparatus comprising:
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a pair of polishing units, the polishing unit comprising;
a polishing table having a polishing surface;
a plurality of top rings for holding workpieces and pressing the workpieces against said polishing surface; and
a carousel for supporting said top rings and indexing said top rings;
a pair of rotary transporters, the rotary transporter being disposed in a position which can be accessed by said top rings and having a plurality of portions positioned on a predetermined circumference from a center of rotation of said rotary transporter for holding the workpieces, said rotary transporter having an indexing function for indexing said plurality of portions; and
a pair of pushers, the pusher being adapted for transferring the workpieces between said rotary transporter and said top rings. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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Specification