Sensing device and sensor apparatus
First Claim
1. A sensing device comprising:
- a vibrator displaceably supported with respect to a substrate;
a plurality of electrode pairs, each having a fixed electrode and a movable electrode, wherein;
the movable electrode is connected to the vibrator and is displaced together with the vibrator with respect to the substrate, and the fixed electrode is fixed onto the substrate facing the movable electrode; and
a plurality of conductors provided on the substrate and connected to the electrode pairs to allow a passage of electric signals, wherein a conductive characteristic of the same kind of the conductors are all similar.
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Accused Products
Abstract
A sensing device, such as an angular speed detecting device, includes a vibrator for improving detection precision. The vibrator is displaceably supported on a substrate and is vibrated in the direction of an X-axis by driving electrodes. Detecting electrodes detect vibrations of the vibrator in the direction of a Y-axis caused by a Coriolis'"'"' force resulting from the angular speed occurring about a Z-axis. Each of the driving and detecting electrodes includes a movable electrode that is connected to the vibrator and that is displaced together therewith on the substrate and a fixed electrode fixed onto the substrate in such a manner as to face the movable electrode. By equalizing conductors connected to fixed electrodes of the driving electrodes and conductors connected to fixed electrodes of the detecting electrodes in length, width, and thickness, respectively, one electrical characteristic is set for those of the wiring portions which function in the same manner.
20 Citations
27 Claims
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1. A sensing device comprising:
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a vibrator displaceably supported with respect to a substrate;
a plurality of electrode pairs, each having a fixed electrode and a movable electrode, wherein;
the movable electrode is connected to the vibrator and is displaced together with the vibrator with respect to the substrate, and the fixed electrode is fixed onto the substrate facing the movable electrode; and
a plurality of conductors provided on the substrate and connected to the electrode pairs to allow a passage of electric signals, wherein a conductive characteristic of the same kind of the conductors are all similar. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A sensing device comprising:
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a vibrator displaceably supported with respect to a substrate;
a plurality of electrode pairs, each having a fixed electrode and a movable electrode, wherein;
the movable electrode is connected to the vibrator and is displaced together with the vibrator with respect to the substrate, and the fixed electrode is fixed onto the substrate facing the movable electrode; and
a plurality of conductors provided on the substrate and being electrically connected to the electrode pairs to allow a passage of electric signals, wherein;
at least some of the conductors connected to the fixed electrode are spaced from the substrate. - View Dependent Claims (16, 17, 18, 19, 20)
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21. A sensing device comprising:
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a substrate;
a vibrator displaceably supported with respect to the substrate and spaced above the substrate; and
a plurality of beams that displaceably support the vibrator with respect to the substrate, wherein a distance between at least one beam and an adjacent member, about any side of the beam, extends equidistant and parallel to the beam. - View Dependent Claims (22, 23, 24)
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25. A sensor apparatus comprising:
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a sensing device having a vibrator displaceably supported with respect to a surface of a substrate;
at least one electric component; and
a board that receives the sensing device and the electric components, wherein the vibrator is mounted to the surface of the substrate and the surface of the substrate is directed in a gravitational direction when the sensor apparatus is operated. - View Dependent Claims (26, 27)
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Specification