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Sensing device and sensor apparatus

  • US 20010045127A1
  • Filed: 04/20/2001
  • Published: 11/29/2001
  • Est. Priority Date: 05/22/2000
  • Status: Active Grant
First Claim
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1. A sensing device comprising:

  • a vibrator displaceably supported with respect to a substrate;

    a plurality of electrode pairs, each having a fixed electrode and a movable electrode, wherein;

    the movable electrode is connected to the vibrator and is displaced together with the vibrator with respect to the substrate, and the fixed electrode is fixed onto the substrate facing the movable electrode; and

    a plurality of conductors provided on the substrate and connected to the electrode pairs to allow a passage of electric signals, wherein a conductive characteristic of the same kind of the conductors are all similar.

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