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X-ray generator, X-ray inspector and X-ray generation method

  • US 20010050972A1
  • Filed: 12/20/2000
  • Published: 12/13/2001
  • Est. Priority Date: 06/08/2000
  • Status: Active Grant
First Claim
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1. An X-ray generator comprising:

  • an energy beam generation source;

    a target for generating an X-ray by being irradiated an energy beam generated from said energy beam generation source;

    a convergence lens for converging the energy beam proceeding to said target from said energy beam generation source;

    a temperature sensor for detecting a temperature near an irradiation point of said energy beam on said target; and

    a control device for controlling a convergence degree of said energy beam on the target by means of said convergence lens based on a temperature signal detected by said temperature sensor.

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