Multi functional cleaning module of manufacturing apparatus for flat panel display and cleaning apparatus using the same

• US 20020000019A1
• Filed: 06/28/2001
• Published: 01/03/2002
• Est. Priority Date: 06/29/2000
• Status: Active Grant

• Current Assignee: DMS Co., Ltd.
• Original Assignee: Byeong Hoo Park, Jeong Jin Kim, Jum Lyul Han, Yong Seok Park
• Inventors: Park, Byeong Hoo, Han, Jum Lyul, Kim, Jeong Jin, Park, Yong Seok
• Granted Patent: US 6,564,421 B2
• Time in Patent Office: Days
• US Class Current: 15/302
• CPC Class Codes: B08B 1/20 Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
• CPC Class Codes: B08B 3/022 Cleaning travelling work B08B3/042 takes precedence
• CPC Class Codes: B08B 7/0057 by ultraviolet radiation

Abstract

The multi functional cleaning module comprises a plurality of air curtain, an eximer ultraviolet light irradiating device, a brush, a high-speed shower device, and an air knife, where they are arranged continually on a plan and the glass substrates are inserted continually into them.

The cleaning apparatus using the multi functional cleaning module comprises a driving part having a loading and an unloading portions as well as the multi functional cleaning module.

Claims

1. A multi functional cleaning module for a flat panel display, comprising:

a plurality of air curtains;

an eximer ultraviolet light irradiating device;

a brush;

a high-speed shower device; and

a V-type air knife, wherein the air curtains, the eximer ultraviolet light irradiating device, the brush, the high-speed shower device, and the air knife are arranged continually on a plane and glass substrates are inserted continually into them.

2. The multi functional cleaning module according to claim 1, wherein the eximer ultraviolet light irradiating device comprises a lamp housing, a cylinder type quartz tube, and an ultraviolet light lamp in the cylinder type quartz tube.

3. The multi functional cleaning module according to claim 2, wherein the ultraviolet light lamp comprises a plurality of outer electrodes, an inner electrode, and a lamp electric source.

4. The multi functional cleaning module according to claim 2, wherein a reflective film is provided in the cylinder type quartz tube in order to reflect ultraviolet light generated from the ultraviolet light lamp.

5. The multi functional cleaning module according to claim 1, wherein the high-speed shower device comprises a water tank in which a cleaner flowed, and a perforated plate for changing the cleaner to a laminar flow and spreading the cleaner onto the surface of the glass substrate.

6. The multi functional cleaning module according to claim 5, wherein the high-speed shower device is provided on upper and lower portions of the glass substrate.

7. The multi functional cleaning module according to claim 5, wherein the high-speed shower device jets an etchant, or a developer.

8. The multi functional cleaning module according to claim 1, wherein the V-type air knife comprises an upper and lower air knife to the glass substrate, and inflow and outflow holes for air.

9. The multi functional cleaning module according to claim 1, further comprising:

a driving roller;

a glass transporting cart;

a transporting wire for transporting the glass transporting cart; and

a jet valve having a water tank and a perforated plate.

10. A cleaning apparatus for a flat panel display, comprising:

a driving part executing loading and unloading a glass substrate;

a multi functional cleaning module having a plurality of air curtain, an eximer ultraviolet light irradiating device, a brush, a high-speed shower device, and an air knife, where they are arranged continually on a plan and the glass substrates are inserted continually into them;

a supporting plate for collecting a cleaner; and

a water tank.