Method of fabricating liquid crystal display with a high aperture ratio
First Claim
1. A method of fabricating a liquid crystal display with a high aperture ratio comprising the steps of:
- forming a gate bus line including a gate electrode on a transparent insulating substrate and at the same time, forming a storage capacitor electrode in parallel with the gate bus line;
depositing a gate insulating layer on the resulting entire surface;
forming a semiconductor layer on the gate insulating layer over the gate electrode;
forming a data line including source/drain electrodes on the semiconductor layer, thereby completing a thin film transistor;
depositing an insulating layer on the resulting lower substrate, wherein the thickness of the insulating layer region formed over the storage capacitor electrode is thinner than that formed over the other part;
forming a contact hole by selectively etching the insulating layer in order to expose a predetermined part of the drain electrode; and
forming a pixel electrode on the insulating layer to be in contact with the exposed drain electrode.
3 Assignments
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Accused Products
Abstract
Disclosed is a method of fabricating a liquid crystal display with a high aperture ratio comprising the steps of: forming a gate bus line including a gate electrode on a transparent insulating substrate and at the same time, forming a storage capacitor electrode in parallel with the gate bus line; depositing a gate insulating layer on the resulting entire surface; forming a semiconductor layer on the gate insulating layer over the gate electrode; forming a data line including source/drain electrodes on the semiconductor layer, thereby completing a thin film transistor; depositing an insulating layer on the resulting lower substrate, wherein the thickness of the insulating layer region formed over the storage capacitor electrode is thinner than that formed over the other part; forming a contact hole by selectively etching the insulating layer in order to expose a predetermined part of the drain electrode; and forming a pixel electrode on the insulating layer to be in contact with the exposed drain electrode.
22 Citations
8 Claims
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1. A method of fabricating a liquid crystal display with a high aperture ratio comprising the steps of:
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forming a gate bus line including a gate electrode on a transparent insulating substrate and at the same time, forming a storage capacitor electrode in parallel with the gate bus line;
depositing a gate insulating layer on the resulting entire surface;
forming a semiconductor layer on the gate insulating layer over the gate electrode;
forming a data line including source/drain electrodes on the semiconductor layer, thereby completing a thin film transistor;
depositing an insulating layer on the resulting lower substrate, wherein the thickness of the insulating layer region formed over the storage capacitor electrode is thinner than that formed over the other part;
forming a contact hole by selectively etching the insulating layer in order to expose a predetermined part of the drain electrode; and
forming a pixel electrode on the insulating layer to be in contact with the exposed drain electrode. - View Dependent Claims (2, 3, 4, 5, 6)
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7. The method of fabricating a liquid crystal display with a high aperture ratio comprising the steps of:
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forming a gate bus line including a gate electrode on a transparent insulating substrate and at the same time, forming a storage capacitor electrode in parallel with the gate bus line;
depositing a gate insulating layer on the resulting surface;
forming a semiconductor layer on the gate insulating layer over the gate electrode;
forming a data line including source/drain electrodes on the semiconductor layer, thereby completing a thin film transistor;
depositing a resin insulating layer on the lower substrate, wherein the thickness of the resin insulating layer region formed over the storage capacitor electrode is thinner than that formed over the other part by using a half-tone mask comprising a chrome silicide layer with different transmittance;
forming a contact hole by selectively removing the resin insulating layer to expose a predetermined part of the drain electrode; and
forming a pixel electrode on the resin insulating layer to be in contact with the exposed drain electrode, wherein the pixel electrode is overlapped with a predetermined part of the data bus line and the gate bus line. - View Dependent Claims (8)
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Specification