Focusing control mechanism, and inspection apparatus using same

• US 20020001403A1
• Filed: 05/22/2001
• Published: 01/03/2002
• Est. Priority Date: 05/25/2000
• Status: Abandoned Application

• Current Assignee: Sony Corporation (Sony Group Corp.)
• Original Assignee: Sony Corporation (Sony Group Corp.)
• Inventors: Kikuchi, Hiroki
• Application Number:
  US09/862,557
• Publication Number:
  US 20020001403A1
• Time in Patent Office: Days
• US Class Current: 382/145
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01N 21/95607 using a comparative method
• CPC Class Codes: G03F 7/70616 Monitoring the printed patterns

Abstract

To properly focus an ultraviolet objective lens by the use of a distance sensor even when inspecting an object having a larger step than the focal depth of the objective lens, a difference between the real shape of a convex or concave pattern in each of dies formed on a semiconductor wafer 100 to be inspected and the shape (false shape) of a convex or concave pattern the distance sensor 8 recognizes, is calculated as a correction value C2 intended for use to compensate for an influence of the step in the die. The output from the distance sensor 8 is compensated with the correction value C2 to determine an accurate target moving distance, and an inspection stage 2 is driven accordingly to the target moving distance to automatically focus the ultraviolet objective lens.

Claims

1. A focusing control mechanism for focusing an objective lens when observing an object under inspection using the objective lens, the mechanism comprising:

a distance sensor provided in a fixed geometric relation to the objective lens;

a storage means for storing data representing the shape of a convex or concave pattern of the object under inspection and data representing a spatial sensitivity distribution of the distance sensor;

means for moving either or both of the objective lens and object under inspection relatively in direction towards or away from each other; and

means for controlling the operation of the moving means;

the controlling means calculating, based on the data representing the shape of convex or concave pattern of the object under inspection and data representing the spatial sensitivity distribution of the distance sensor, both stored in the storage means, a deviation of the shape of a convex or concave pattern recognized by the distance sensor from the real shape of convex or concave pattern, to provide a correction value, compensating for an output from the distance sensor with the correction value to determine a target moving distance, and controlling the operation of the moving means according to the target moving distance.

2. The mechanism as set forth in claim 1, wherein as data representing a convex or concave pattern of the object under inspection, coordinate data of two points each representing one convex or concave pattern is stored in the storing means;

and

the controlling means recognizes a rectangular area whose diagonal is a line connecting the two points as a real contour of the convex or concave pattern.

3. The mechanism as set forth in claim 1, wherein a capacitance sensor is provided as the distance sensor.

4. An inspection apparatus comprising:

an illuminating means for illuminating an object under inspection with an illumination light converged by an objective lens;

an imaging means for imaging the object under inspection;

illuminated by the illuminating means;

an inspecting means for processing an image picked up by the imaging means to inspect the object under inspection;

a distance sensor provided in a fixed geometric relation to the objective lens;

a storage means for storing data representing the shape of a convex or concave pattern of the object under inspection and data representing a spatial sensitivity distribution of the distance sensor;

means for moving either or both of the objective lens and object under inspection relatively in direction towards or away from each other; and

means for controlling the operation of the moving means;

the controlling means calculating, based on the data representing the shape of convex or concave pattern of the object under inspection and data representing the spatial sensitivity distribution of the distance sensor, both stored in the storage means, a deviation of the shape of a convex or concave pattern recognized by the distance sensor from the real shape of convex or concave pattern, to provide a correction value, compensating for an output from the distance sensor with the correction value to determine a target moving distance, and controlling the operation of the moving means according to the target moving distance.

5. The apparatus as set forth in claim 4, wherein as data representing a convex or concave pattern of the object under inspection, coordinate data of two points each representing one convex or concave pattern is stored in the storing means;

and

the controlling means recognizes a rectangular area whose diagonal is a line connecting the two points as a real contour of the convex or concave pattern.

6. The apparatus as set forth in claim 4, wherein a capacitance sensor is provided as the distance sensor.

7. The apparatus as set forth in claim 4, wherein the illuminating means illuminates the object under inspection with an illumination light having a wavelength falling within an ultraviolet domain.