MICRO-PASSAGE ELEMENT USED FOR FLUID ANALYSIS

• US 20020001695A1
• Filed: 04/01/1998
• Published: 01/03/2002
• Est. Priority Date: 04/14/1997
• Status: Abandoned Application

• Current Assignee: Olympus Optical Company Ltd. (Olympus Corporation)
• Original Assignee: Olympus Optical Company Ltd. (Olympus Corporation)
• Inventors: KONDO, SEIJI, SHINOHARA, ETSUO, TAJIMA, NOBUYOSHI
• Application Number:
  US09/053,426
• Publication Number:
  US 20020001695A1
• Time in Patent Office: Days
• US Class Current: 428/138
• CPC Class Codes: B01L 2200/12 Specific details about manufacturing devices
• CPC Class Codes: B01L 2300/028 Graduation
• CPC Class Codes: B01L 2300/0654 Lenses; Optical fibres
• CPC Class Codes: B01L 2300/0816 Cards, e.g. flat sample carriers usually with flow in two horizontal directions
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 2300/168 Specific optical properties, e.g. reflective coatings
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/502715 characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
• CPC Class Codes: B01L 3/569 Glassware
• CPC Class Codes: B81C 1/00071 Channels
• CPC Class Codes: B81C 2201/019 Bonding or gluing multiple substrate layers
• CPC Class Codes: Y10T 428/24273 including aperture
• CPC Class Codes: Y10T 428/24322 Composite web or sheet
• CPC Class Codes: Y10T 428/24331 including nonapertured component
• CPC Class Codes: Y10T 428/24612 Composite web or sheet
• CPC Class Codes: Y10T 428/24744 Longitudinal or transverse tubular cavity or cell

Abstract

The micro fluid passage element of the present invention has the structure in which the first quartz glass substrate which is insulative and flat, and the second quarts glass substrate joining together while interposing the laminated film consisting of a polysilicon thin film, an alkali-ion containing glass layer such as borosilicate glass thin film, and a polysilicon thin film, the surfaces of the pair of quartz glass substrates, which are located on a joining side, being made to face each other, and the micro fluid passage element has a piecing hole serving as a fluid passage for instrumental analysis, formed along the laminated film and a direction of a surface of at least one of the pair of the quartz glass substrate, made at an arbitrary depth.

Claims

1. A micro fluid passage element comprising:

a laminated film formed by interposing an alkali-ion containing glass layer between a pair of silicon layers from both surfaces; and

a pair of quartz glass substrates adhered on both surfaces of the laminated film as to be joined together as an integral body in a manner that surfaces of the pair of quartz glass substrates, which are located on a joining side, face to each other,

wherein the micro fluid passage element has a piercing hole as a fluid passage, said piercing hole being defined by the surfaces of the pair of quarts glass substrates, which are located on the joining side and the cross sections of the laminated film, as they face respectively each other, as a groove is made in the surface of at least one of the pair of quarts glass substrates to an arbitrary depth.

10. The micro fluid passage element according to claims 1 and 2, wherein the silicon layer is made of polysilicon.

11. The micro fluid passage element according to claim 1, wherein a thickness of each of the quartz glass substrate is 1 mm or less, and both sides thereof is polished to be smooth, a thickness of the silicon thin film is 1 μ

m or less, and a thickness of the borosilicate glass thin film is 1 μ

m or less.

13. The micro fluid passage element according to claims 1 and 2, wherein a depth or width of the piercing hole is 150 μ

m.

2. A micro fluid passage element comprising:

a laminated film formed by interposing a silicon oxide film and an alkali-ion containing glass layer laminated, between a pair of silicon layers from both surfaces; and

a pair of quartz glass substrates adhered on both surfaces of the laminated film as to be joined together as an integral body in a manner that surfaces of the pair of quartz glass substrates, which are located on a joining side, face to each other,

wherein the micro fluid passage element has a piercing hole as a fluid passage, said piercing hole being defined by the surfaces of the pair of quarts glass substrates, which are located on the joining side and the cross sections of the laminated film, as they face respectively each other, as a groove is made in the surface of at least one of the pair of quarts glass substrates to an arbitrary depth.

3. The micro fluid passage element according to claim 2, wherein a reflection film is formed on at least one of the surfaces of the pair of quartz glass substrates, which are located on a non-joining side.

4. The micro fluid passage element according to claim 3, wherein a reflection film is made of one of a polysilicon thin film and a metal thin film.

5. The micro fluid passage element according to claim 3, wherein one of a light reflection layer or a light absorption layer having a plurality of light transmitting openings in the surfaces of the pair quartz glass substrates, which are located on the non-joining side, at positions which sandwich the fluid pass, is formed on the non-joining surface.

6. The micro fluid passage element according to claim 5, wherein a scale is marked close to the light transmitting openings of the light reflection layer or the light absorption layer formed on the surfaces of the pair quartz glass substrates, which are located on the non-joining side, along a direction in which a fluid flows in the fluid passage.

7. The micro fluid passage element according to claim 5, wherein a recessed portion is provided in the openings made in the light reflection layer or the light absorption layer, in an inner side of the fluid passage of the quartz glass substrates.

8. The micro fluid passage element according to claim 2, wherein a convex shaped projection is provided on at least one of the surfaces of the quartz glass substrates, which are located on the non-joining side.

9. The micro fluid passage element according to claim 2, wherein a film having a low light transmitting rate is formed on the surfaces of the quartz glass substrates, which are located on the non-joining side, and at least one light transmitting window is formed at positions sandwiching the fluid passage.

12. The micro fluid passage element according to claim 2, wherein a thickness of each of the quartz glass substrate is 1 mm or less, and both sides thereof is polished to be smooth, a thickness of the silicon thin film is 1 μ

m or less, a thickness of the borosilicate glass thin film is 1 μ

m or less, and a thickness of the silicon oxide film is 500 μ

m or less.