Method for fabricating a stencil mask

• US 20020001964A1
• Filed: 06/28/2001
• Published: 01/03/2002
• Est. Priority Date: 06/28/2000
• Status: Active Grant

• Current Assignee: Hynix Semiconductor Incorporated (SK Hynix Inc.)
• Original Assignee: Hynix Semiconductor Incorporated (SK Hynix Inc.)
• Inventors: Choi, Jae Seung
• Granted Patent: US 6,475,399 B2
• Time in Patent Office: Days
• US Class Current: 438/719
• CPC Class Codes: G03F 1/20 Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
• CPC Class Codes: H01J 2237/0453 multiple apertures
• CPC Class Codes: H01J 2237/3175 Lithography

Abstract

Disclosed is a method for fabricating a stencil mask for use in electron beam lithography which improves resolution by effectively reducing beam blur resulting from coulomb repulsion effects in the electron beam. The disclosed method includes fabricating a first mask and a second mask that are then aligned and joined to form the final stencil mask. The structure of the second mask limits the number and controls the initial pattern of the electrons that pass through the stencil mask to limit beam blur, narrow the incident energy distribution, and improve the resolution of the final image.

Claims

1. A method for fabricating a stencil mask comprising the steps of:

preparing a first wafer consisting of

a first silicon film having an upper surface and a lower surface,

a silicon oxide film formed on the upper surface of the first silicon film, and

a second silicon film formed on an upper surface of the silicon oxide film;

forming a first photoresist film pattern on the second silicon film;

etching the second silicon film to expose the silicon oxide film and to form a first etched surface;

removing the first photoresist film pattern;

forming a first silicon nitride film on the first etched surface of the second silicon film and lower surface of the first silicon film and side walls of the first and second silicon films and the silicon oxide film;

forming a second photoresist film pattern on the second silicon nitride film;

etching the first silicon nitride film, the first silicon film, and the silicon oxide film using the second photoresist film pattern film as an etching mask;

removing the second photoresist pattern film;

removing the first silicon nitride film to form a first opening through the first wafer;

forming a first metal film on all surfaces of the first wafer, including the lower surface of the first silicon layer and the upper surface of the second silicon layer, to complete a first mask;

preparing a second wafer consisting of

a third silicon film having an upper surface and a lower surface,

a titanium film formed on the upper surface of the third silicon film,

a titanium nitride film formed on an upper surface of the titanium film, and

a second metal film formed on an upper surface of the titanium nitride film;

forming a third photoresist film pattern on an upper surface of the second metal film;

etching the second metal film, the titanium nitride film, and the titanium film to expose the third silicon film using the third photoresist film pattern as an etching mask to form a second etched surface;

removing the third photoresist film pattern;

forming a second silicon nitride film on the second etched surface of the third silicon film, the lower surface of the third silicon film and side wall of the second wafer;

forming a fourth photoresist film pattern on the second silicon nitride film on the lower part of the third silicon film;

etching the second silicon nitride film and the third silicon film using a fourth photoresist film pattern as an etching mask;

removing the fourth photoresist film pattern;

removing the second silicon nitride film to complete a second mask to form a plurality of second openings through the second wafer;

aligning the first opening with the second openings; and

joining the first mask and the second mask by applying a conductive adhesive between the first metal layer of the first mask and the second metal layer of the second mask to form the stencil mask.

2. The method according to claim 1, wherein the first metal layer of the first mask comprises a metal selected from the group consisting of Au, W, Pt, Pd, and their alloys.

3. The method according to claim 2, wherein the thickness of the first metal layer is about 500-3000 Å

.

4. The method according to claim 1, wherein the second metal layer on the second mask comprises a metal selected from the group consisting of Au, W, Pt, Pd, and their alloys.

5. The method according to claim 4, wherein the thickness of the second metal layer is about 500-3000 Å

.

6. The method according to claim 1, wherein each of the nitride films comprise Si₃N_4.

7. The method according to claim 1, wherein the first nitride film and the second nitride film are formed simultaneously.

8. The method according to claim 7, wherein the third nitride film and the fourth nitride film are formed simultaneously.

9. The method according to claim 1, wherein the conductive adhesive comprises a silver paste.