Photonic crystal multilayer substrate and manufacturing method thereof
First Claim
1. A photonic crystal multilayer substrate having portions, each portion having a slab-waveguide type photonic crystal structure, multilayered in the direction of the thickness of the substrate, wherein in the slab-waveguide type photonic crystal structure:
- a photonic crystal layer is disposed between cladding layers;
the photonic crystal layer is made of a photonic crystal having a two or three dimensional periodically modulated structure with respect to the effective refractive index in the order of optical wavelengths; and
each cladding layer is made of a material whose effective refractive index differs from the effective refractive index of the photonic crystal layer.
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Accused Products
Abstract
A lightwave circuit, by which the degree of integration can be further improved by employing a multilayered structure of wiring, is disclosed. The disclosed photonic crystal multilayer substrate has portions, each portion having a slab-waveguide type photonic crystal structure, multilayered in the direction of the thickness of the substrate. In the photonic crystal structure, a photonic crystal layer is disposed between cladding layers; the photonic crystal layer is made of a photonic crystal having a two or three dimensional periodically modulated structure with respect to the effective refractive index in the order of optical wavelengths; and each cladding layer is made of a material whose effective refractive index differs from the effective refractive index of the photonic crystal layer.
35 Citations
16 Claims
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1. A photonic crystal multilayer substrate having portions, each portion having a slab-waveguide type photonic crystal structure, multilayered in the direction of the thickness of the substrate, wherein in the slab-waveguide type photonic crystal structure:
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a photonic crystal layer is disposed between cladding layers;
the photonic crystal layer is made of a photonic crystal having a two or three dimensional periodically modulated structure with respect to the effective refractive index in the order of optical wavelengths; and
each cladding layer is made of a material whose effective refractive index differs from the effective refractive index of the photonic crystal layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of manufacturing a photonic crystal multilayer substrate, comprising the steps of:
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forming a cladding layer on a first substrate;
forming a photonic crystal layer on the cladding layer, where the photonic crystal layer is used for forming a lightwave circuit;
producing a first wafer by forming a lightwave circuit in the photonic crystal layer, where the lightwave circuit is assigned to a first layer of the photonic crystal multilayer substrate;
producing a second wafer by forming a cladding layer on a second substrate and forming a photonic crystal layer on this cladding layer;
producing a composite wafer by putting the first and second wafers together in a manner such that the photonic crystal layer of the first wafer adheres with the cladding layer of the second wafer;
removing the substrate portion of the second wafer from the composite wafer;
forming a lightwave circuit in the photonic crystal layer which is exposed after the removal of the substrate portion of the second wafer, where this lightwave circuit is assigned to a second layer of the photonic crystal multilayer substrate; and
forming a multilayered lightwave circuit in the photonic crystal layers by repeating the above steps.
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Specification