Susceptor and manufacturing method thereof

• US 20020006678A1
• Filed: 04/03/2001
• Published: 01/17/2002
• Est. Priority Date: 04/05/2000
• Status: Active Grant

• Current Assignee: Sumitomo Osaka Cement Company Limited
• Original Assignee: Sumitomo Osaka Cement Company Limited
• Inventors: Kawase, Takeshi, Ootsuka, Takeshi, Inazumachi, Hiroshi
• Granted Patent: US 6,693,789 B2
• Time in Patent Office: Days
• US Class Current: 438/20
• CPC Class Codes: H01L 21/6835 using temporarily an auxiliary support
• CPC Class Codes: Y10T 29/49124 On flat or curved insulated base, e.g., printed circuit, etc.

Abstract

A built-in electrode type susceptor having excellent corrosion resistance and plasma resistance is obtained.

A placement plate and a support plate made of ceramics are prepared, fixation holes are formed in this support plate, and feeding terminals consisting of a conductive composite ceramics are fitted into these fixation holes so as to penetrate through the support plate. A conductive material layer consisting of a conductive composite ceramics is formed on this support plate so as to come into contact with the feeding terminals, and the support plate and the placement plate are overlapped on each other via the conductive material layer on the support plate, and subjected to sintering and heat treatment under application of pressure, to thereby integrate these plates. Also, the conductive material layer is used as an internal electrode consisting of a conductive composite ceramics sintered body, to thereby obtain a built-in electrode type susceptor. At the time of overlapping and bonding the placement plate and the support plate, these may be bonded via a nonconductive layer having the same material as these plates.

Claims

1. A built-in electrode type susceptor comprising a placement plate for placing a plate sample thereon, a support plate for supporting this placement plate, an internal electrode provided between these placement plate and support plate so as not to come in contact with the outside, and a feeding terminal provided penetrating through said support plate so as to come in contact with the internal electrode, wherein said placement plate and said support plate are integrally bonded by a nonconductive material having the same composition or the same main component as that of the material constituting these plates.

7. A built-in electrode type susceptor according to either one of claim 1 or 2, wherein said placement plate and said support plate comprise an alumina group sintered body or an aluminum nitride group sintered body.

2. A built-in electrode type susceptor comprising a placement plate for placing a plate sample thereon, a support plate for supporting this placement plate, an internal electrode provided between these placement plate and support plate so as not to come in contact with the outside, and a feeding terminal provided penetrating through said support plate so as to come in contact with the internal electrode, wherein said internal electrode and said feeding terminal are formed of a conductive ceramics.

3. A built-in electrode type susceptor according to claim 2, wherein said conductive ceramics is any one kind of composite ceramics conductors selected from an alumina-tantalum carbide composite ceramics conductor, an alumina-tungsten composite ceramics conductor, an alumina-silicon carbide composite ceramics conductor, an aluminum nitride-tungsten composite ceramics conductor, or an aluminum nitride-tantalum composite ceramics conductor.

4. A built-in electrode type susceptor according to claim 3, wherein said alumina-tantalum carbide composite ceramics conductor contains tantalum in an amount of from 54 to 71% by weight.

5. A built-in electrode type susceptor according to claim 3, wherein said alumina-tungsten composite ceramics conductor contains tungsten in an amount of from 54 to 95% by weight.

6. A built-in electrode type susceptor according to claim 3, wherein said alumina-silicon carbide composite ceramics conductor contains silicon carbide in an amount of from 5 to 30% by weight.

8. A method of manufacturing a built-in electrode type susceptor comprising steps of:

preparing a plate-like placement plate and support plate from a ceramics sintered body;

forming a fixation hole for fixing a feeding terminal in the support plate;

fitting the feeding terminal in said fixation hole so as to penetrate through the support plate;

forming a conductive material layer serving as an internal electrode on said support plate holding the feeding terminal, so as to come in contact with the feeding terminal;

overlapping said support plate and said placement plate on each other via said conductive material layer, and subjecting these to sintering processing under application of pressure to thereby integrate these plates; and

forming an internal electrode consisting of said conductive material layer between these support plate and placement plate.

9. A method of manufacturing a built-in electrode type susceptor according to claim 8, wherein when the support plate and the placement plate are overlapped on each other, a nonconductive material layer comprising a powdery material having the same composition or the same main component as that of the ceramics sintered body constituting said placement plate and said support plate is formed in an area other than the area where said conductive material layer is formed on the support plate.

10. A method of manufacturing a built-in electrode type susceptor according to either one of claim 8 and claim 9, wherein as the conductive material serving as the internal electrode or the feeding terminal, any one kind selected from an alumina-tantalum carbide composite ceramics conductive material, an alumina-tungsten composite ceramics conductive material, an alumina-silicon carbide composite ceramics conductive material, an aluminum nitride-tungsten composite ceramics conductive material, an aluminum nitride-tantalum composite ceramics conductive material, or a high melting metal is used.