MONOLITHIC HIGH-Q INDUCTANCE DEVICE AND PROCESS FOR FABRICATING THE SAME
First Claim
1. An inductance device formed on a semiconductor substrate, comprising:
- a first insulating layer and a second insulating layer, which are covered on different surfaces of the semiconductor substrate respectively, the second insulating layer having a lower dielectric constant than the first insulating layer; and
a conducting coil formed on the second insulating layer.
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Abstract
The present invention provides a high-Q inductance device and a process for fabricating the same. The inductance device is formed on a semiconductor substrate and includes a first insulating layer, a second insulating layer, and a conducting coil. The first and second insulating layers are covered on different surfaces of the semiconductor substrate, respectively, and the second insulating layer has a lower dielectric constant than the first insulating layer. The conducting coil is formed on the second insulating layer. According to the present invention, the parasitic capacitance between the conducting coil and the substrate can be decreased by means of forming a conducting coil on an insulating layer having a low dielectric constant.
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15 Claims
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1. An inductance device formed on a semiconductor substrate, comprising:
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a first insulating layer and a second insulating layer, which are covered on different surfaces of the semiconductor substrate respectively, the second insulating layer having a lower dielectric constant than the first insulating layer; and
a conducting coil formed on the second insulating layer. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A process for fabricating an inductance device, comprising the following steps of:
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(a) providing a semiconductor substrate;
(b) forming a first insulating layer and a second insulating layer on different surfaces of the semiconductor substrate respectively, wherein the second insulating layer has a lower dielectric constant than the first insulating layer; and
(c) forming a conducting coil on the second insulating layer. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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Specification