Manufacturing method of active matrix substrate
First Claim
1. A manufacturing method of an active matrix substrate comprising the steps of:
- a film lamination step for depositing a plurality of films to form laminated films on an insulating substrate;
a resist pattern formation step for forming a resist pattern having a plurality of film thicknesses on said laminated films;
a first etching step for etching said laminated films using said resist pattern as a first etching mask;
a resist etching step for etching said resist pattern to remove a thinner portion of said resist pattern; and
a second etching step for etching said laminated films using a remaining portion of said resist pattern left after said resist etching process as a second etching mask.
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Accused Products
Abstract
The photolithography processes for connecting the first conductive film pattern, which is a lower layer such as a gate electrode of a TFT, to a second conductive film pattern, which is an upper layer such as a source/drain electrode of a TFT are reduced by utilizing laminated films and a resist pattern formed thereon having different film thicknesses. Laminated films constituting the source/drain electrode are formed by depositing films on an insulating substrate on which the first conductive film pattern is formed, and the resist pattern is formed on the top layer of the laminated films, and then utilizing the film thickness difference of the resist pattern and the film composition of the laminated films, the short circuited wiring between the gate electrode and the source/drain electrode for an Electro-Static-Discharge protection circuit of the active matrix substrate can be formed by less photolithography processes than that in the manufacturing of the conventional active matrix substrate.
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Citations
11 Claims
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1. A manufacturing method of an active matrix substrate comprising the steps of:
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a film lamination step for depositing a plurality of films to form laminated films on an insulating substrate;
a resist pattern formation step for forming a resist pattern having a plurality of film thicknesses on said laminated films;
a first etching step for etching said laminated films using said resist pattern as a first etching mask;
a resist etching step for etching said resist pattern to remove a thinner portion of said resist pattern; and
a second etching step for etching said laminated films using a remaining portion of said resist pattern left after said resist etching process as a second etching mask. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification