Non-contact photothermal radiometric metrologies and instrumentation for characterization of semiconductor wafers, devices and non electronic materials

• US 20020011852A1
• Filed: 03/21/2001
• Published: 01/31/2002
• Est. Priority Date: 03/21/2000
• Status: Abandoned Application

• Current Assignee: Photo-Thermal Diagnostics Inc.
• Original Assignee: Photo-Thermal Diagnostics Inc.
• Inventors: Nicolaides, Lena, Pauloni, Stefano, Rodriguze-Garcia, Mario Enrique, Garcia-Hercules, Jose Agustin, Mandelis, Andreas
• Application Number:
  US09/813,357
• Publication Number:
  US 20020011852A1
• Time in Patent Office: Days
• US Class Current: 324/752
• CPC Class Codes: G01R 31/2656 using non-ionising electromagnetic radiation, e.g. optical radiation
• CPC Class Codes: G01R 31/2831 Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates G01R31/318511 takes precedence; testing during manufacture H01L22/00
• CPC Class Codes: G01R 31/311 of integrated circuits G01R31/31728 takes precedence

Abstract

There is provided a metrologic methodology, useful for in-situ, non-destructive monitoring, comprising a combination of novel signal generation and analysis techniques, computational techniques, and laser infrared radiometric instrumental configurations for measuring thermal and electronic properties of industrial semiconductor wafers and non-electronic materials. This methodology includes: the combination of the frequency sweep (Chirp) and conventional frequency scan techniques for rapid measurement of electronic and thermal transport properties of semiconductor and engineering materials/devices. The common-mode rejection demodulation (bi-modal pulse) method for detection of very weak inhomogeneities in materials, based on generating a real time periodic waveform consisting of two incident square-wave pulses. The foregoing common-mode rejection demodulation method is a very general signal generation and detection methodology and is not limited to photothermal or photoacoustic phenomena, but rather encompasses any and all methodologies that utilize signal modulation. The multiparameter computational method for determining a unique set of thermal and electronic parameters of semiconductor (e.g. Si) wafers, from frequency domain measurements, based on the specifics of signal sensitivity dependence on a given transport parameter across particular regions of the waveform repetition frequency spectrum. And the depth profilometry and roughness elimination method for determining thermal diffusivity profiles of rough samples by processing the experimental data with an approach to roughness based on the concept of the equivalence of random size-parameter distribution of rough layers to white noise.

Claims

1. A photothermal radiometric method for measuring thermal and electronic properties of a semiconductor material, comprising:

(a) providing a sample of the semiconductor;

(b) irradiating the sample with an excitation pulse which is one of amplitude-modulated, frequency modulated and phase modulated with a linear frequency ramp wherein a photothermal radiometric signal is responsively emitted from said semiconductor;

(c) detecting amplitude and phase responses of said emitted photothermal signal using a detection means connected to a instrumental signal processing means;

(d) producing an instrumental signal processing means transfer function by fitting frequency-scan data from a material with known thermal and electronic properties to a multiparameter theoretical model which uses these properties, and normalizing the amplitude and phase of the photothermal response using said instrumental transfer function to produce a normalized photothermal response; and

(e) fitting said normalized photothermal response to said multiparameter theoretical model to calculate the thermal and electronic properties of the semiconductor.

2. The method according to claim 1 including calibrating said response by means of an appropriate reference sample response to normalize out the instrumental response and retain only the physical response of a sample under investigation.

3. The method according to claim 1 wherein said instrumental signal processing means is one of a dynamic signal analyzer, lock-in amplifier, phase-demodulator and cross-correlator.

4. The method according to claim 1 wherein said sample is a non electronic material (solid), wherein the sample is irradiated with an excitation pulse, which is amplitude-modulated with a linear frequency ramp (“

chirp”

), or, alternately, frequency- or phase-modulated, and cross-correlated with the received photothermal signal, wherein a photothermal radiometric signal is responsively emitted from said sample;

wherein detecting said emitted temporal photothermal signal into a signal detection means (dynamic signal analyzer or lock-in amplifier, phase modulator or cross-correlator) that can capture one, several or all frequency components of the waveforms of the incident and response signal spectra; and

thus transform the time-resolved, repetitive photothermal radiometric response into part or all of its Fourier spectrum (the frequency domain (FFT));

wherein normalizing such response with an instrumental (calibration) function obtained in conjunction with the particular modulation frequency-scan technique utilized in a given test;

wherein fitting said photothermal response to a theoretical model to calculate the thermal properties (thermal diffusivity and conductivity) of said material or alternatively calibrating said response by means of an appropriate reference sample response to normalize out the instrumental response and retain only the physical response of a sample under investigation.

5. The method according to claim 1 wherein said sample is a coating on a non electronic material (solid), wherein the sample is irradiated with an excitation pulse which is amplitude-modulated with a linear frequency ramp (“

chirp”

), or, alternately, frequency- or phase-modulated, and cross-correlated with the received photothermal signal, wherein a photothermal radiometric signal is responsively emitted from said sample;

wherein detecting said emitted temporal photothermal signal into a signal detection means (dynamic signal analyzer or lock-in amplifier, phase modulator or cross-correlator) that can capture one, several or all frequency components of the waveforms of the incident and response signal spectra; and

thus transform the time-resolved, repetitive photothermal radiometric response into part or all of its Fourier spectrum (the frequency domain (FFT));

wherein normalizing such response with an instrumental (calibration) function obtained in conjunction with the particular modulation frequency-scan technique utilized in a given test;

wherein fitting said photothermal response to a theoretical model to calculate the thermal properties (thermal diffusivity and conductivity) of said material or alternatively calibrating said response by means of an appropriate reference sample response to normalize out the instrumental response and retain only the physical response (thermal diffusivity and conductivity) and/or thickness of said coating.

6. A method for detection of weak inhomogeneities in semiconductor materials comprising:

(a) providing a sample of the semiconductor;

(b) irradiating the sample with an excitation source;

(c) generating a real time periodic waveform consisting of a bi-modal square-pulse waveform;

(d) detecting the signal response and feeding it to a lock-in amplifier (single or dual channel), by scanning the center-to-center time delay between the two pulses of the bi-modal waveform.

7. The method according to claim 6 wherein said sample is a ion-implanted semiconductor, wherein the sample is irradiated with an optical excitation source, wherein a real time periodic waveform consisting of a bi-modal waveform (two square-wave pulses) is generated, wherein a photothermal radiometric signal is responsively emitted from said sample;

wherein detecting the photothermal signal response and feeding it to a lock-in amplifier (single or dual channel), by scanning the center-to-center time delay between the two pulses.

8. The method according to claim 6 wherein said sample is an epitaxial (epi-) layer semiconductor, wherein the sample is irradiated with an optical excitation source, wherein a real time periodic waveform consisting of of a bi-modal waveform (two square-wave pulses) is generated instrumentally, wherein a photothermal radiometric signal is responsively emitted from said sample;

wherein detecting the signal response (photothermal, electrical, optical or any other form of modulated signal generation) and feeding it to a lock-in amplifier (single or dual channel), by scanning the center-to-center time delay between the two pulses.

9. The method according to claim 6 wherein said sample is a semicondutor with scribeline structure, wherein the sample is irradiated with an optical excitation source, wherein a real time periodic bi-modal waveform consisting of two pulses is generated, wherein a photothermal radiometric signal is responsively emitted from said sample;

wherein detecting the photothermal signal response and feeding it to a lock-in amplifier (single or dual channel), by scanning the center-to-center time delay between the two pulses.

10. The method according to claim 6 wherein said sample is a semicondutor with diffusion and, space-charged layers, wherein the sample is irradiated with an optical excitation source, wherein a real time bi-modal periodic waveform consisting of two pulses is generated, wherein a photothermal radiometric signal is responsively emitted from said sample;

wherein detecting the photothermal signal response and feeding it to a lock-in amplifier (single or dual channel), by scanning the center-to-center time delay between the two pulses.

11. The method according to claim 6 wherein said sample is a metal, wherein the sample is irradiated with an optical excitation source, wherein a real time bi-modal periodic waveform consisting of two pulses is generated, wherein a photothermal radiometric signal is responsively emitted from said sample;

wherein detecting the photothermal signal response and feeding it to a lock-in amplifier (single or dual channel), by scanning the center-to-center time delay between the two pulses.

12. The method according to claim 6 wherein said sample is a liquid mixture, wherein the sample is irradiated with an optical excitation source, wherein a real time bi-modal periodic waveform consisting of two pulses is generated, wherein a photothermal radiometric signal is responsively emitted from said sample;

wherein detecting the photothermal signal response and feeding it to a lock-in amplifier (single or dual channel), by scanning the center-to-center time delay between the two pulses.

19. The method according to claim 6 wherein said excitation source is one of an optical excitation source, an electrical excitation source and an electron beam source.

13. A laser photothermal radiometric instrument coupled with a computational method for determining thermal and electronic parameters of industrial semiconductor (e.g. Si) wafers, from frequency domain measurements comprising:

(a) providing a sample of the semiconductor;

(b) irradiating the sample with a periodic laser source causing a radiometric photothermal signal to be responsively emitted by the sample;

(c) detecting said photothermal signal and inputting said photothermal signal to a lock-in amplifier;

(d) storing amplitude and phase of the emitted photothermal signal for each frequency scan in a computer processor;

(e) applying the multiparameter computational method to obtain the thermal and electronic properties of the semiconductor.

16. The method according to claim 13 wherein said sample is a patterned (scribeline) semiconductor, wherein the sample is irradiated with a periodic optical excitation source causing a laser photothermal radiometric signal at a fixed laser modulation frequency, wherein detecting said photothermal signal and inputting said photothermal signal to a lock-in amplifier, wherein storing the mapping data in a personal computer, wherein producing the thermoelectronic image of the semiconductor by displaying the amplitude and/or phase or the in-phase and quadrature versus the X-Y position coordinate scan.

14. An instrumental method for producing parallel or sequentially acquired and processed laser radiometric electronic imaging of semiconductor wafer, which comprises:

(a) providing a sample of the semiconductor;

(b) irradiating the sample with a periodic optical (laser) source causing a photothermal signal at a fixed laser modulation frequency and an image for the X-Y directions.

(c) detecting said photothermal radiometric signal and inputting said photothermal signal to a lock-in amplifier

(d) storing the mapping data in a personal computer; and

(e) producing a thermoelectronic image of the semiconductor by displaying the amplitude and/or phase vs. the X-Y positions.

15. An instrumental method for producing parallel or sequentially-acquired and processed laser radiometric electronic imaging of a semiconductor wafer, which comprises:

(f) providing a sample of the semiconductor;

(g) irradiating the sample with a periodic optical (laser) source causing a photothermal signal at a fixed laser modulation frequency using the bi-modal common-mode rejection demodulation waveform and an image for the X-Y directions;

(h) detecting said photothermal radiometric signal and inputting said photothermal signal to a lock-in amplifier;

(i) storing the mapping data in a personal computer;

producing the thermoelectronic image of the semiconductor by displaying the in-phase and/or quadrature of the demodulated lock-in output vs. the X-Y positions at a fixed center-to-center time delay so as to obtain signals in the neighborhood of the zero crossing point, for maximum signal baseline suppression.

17. A photothermal instrument and method for depth profilometry and roughness elimination for determining thermal diffusivity profiles of rough samples, comprising:

(a) providing a sample of the inhomogeneous material;

(b) irradiating the sample with a periodically excited source (laser)

(c) detecting the photothermal radiometric (or otherwise) frequency sweep signal with an infrared wide-bandwidth detector such as a mercury-cadmium-telluride (MCT) cryogenic detector and a lock-in amplifier

(d) storing the experimental data in a personal computer;

(e) normalizing such response with an instrumental (calibration) function obtained in conjunction with the lock-in/frequency scan technique;

or amplitude-modulated with a linear frequency ramp (“

chirp”

), or, alternately, frequency- or phase-modulated, and cross-correlated with the received photothermal signal;

(f) processing the experimental data with a heuristic approach to roughness so as to eliminate the effects of roughness;

(g) applying to the processed data the theoretical/computational model to reconstruct the thermal diffusivity profile.

18. The method according to claim 17 wherein said sample is multi-layer structure (coating) sample, wherein the sample is irradiated with a periodic optical excitation source causing a photothermal signal. A method of roughness elimination for determining thermal diffusivity and conductivity of rough-homogeneous multilayer samples, wherein detecting the photothermal frequency sweep signal with a lock-in amplifier and

storing the experimental data in a personal computer;

wherein normalizing such response with an instrumental (calibration) function obtained in conjunction with the lock-in/frequency scan technique;

or amplitude-modulated with a linear frequency ramp (“

chirp”

), or, alternately, frequency- or phase-modulated, and cross-correlated with the received photothermal signal;

wherein processing the experimental data with a heuristic approach to roughness so as to eliminate the effects of roughness;

wherein applying to the processed data the theoretical/computational model to determine the thermal diffusivity and conductivity of the sample coating.