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Optical microdevice with rotatable microactuator

  • US 20020012491A1
  • Filed: 10/05/2001
  • Published: 01/31/2002
  • Est. Priority Date: 07/30/1996
  • Status: Active Grant
First Claim
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1. An optical microswitch for use with a laser beam comprising a support body, first and second output fibers carried by the body, a rotary electrostatic microactuator carried by the body and extending in a plane, a micromirror disposed out of the plane, the microactuator having a mirror holder coupled to the micromirror and at least one comb drive assembly coupled to the mirror holder for driving the micromirror about an axis of rotation extending perpendicular to the plane between a first position for reflecting the laser beam to the first output fiber and a second position for reflecting the laser beam to the second output fiber.

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